Silicon-based liquid crystal device, manufacturing method thereof and silicon-based liquid crystal display panel
A technology of silicon-based liquid crystals and manufacturing methods, which is applied in the directions of instruments, nonlinear optics, optics, etc., can solve the problems of image contrast reduction and affect the display effect of silicon-based liquid crystal display panels, etc., achieve the improvement of light reflectivity and avoid stray light reflection Enter, display the effect of effect enhancement
Active Publication Date: 2020-03-27
HUA WEI SEMICONDUCTOR (SHANGAHAI) CO LTD
View PDF5 Cites 6 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0004] Wherein, in the process of forming the pixel electrode on the substrate, due to the influence of the etching process, the width of the top of the gap between two adjacent pixel electrodes is greater than the width of the bottom, which will cause light to enter the gap. After the insulating barrier layer reaches the surface of the pixel electrode on the side wall of the gap, the light is reflected, which causes stray light to reflect upwards and enter the optical system of the liquid crystal on silicon substrate, thereby reducing the contrast of the image and affecting the display of the liquid crystal on silicon display panel Effect
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0039] refer to Figure 2a-2f , a method of manufacturing a silicon-based liquid crystal device is as follows:
[0040] First, if Figure 2a As shown, a substrate 10 is provided, and a plurality of periodically arranged dielectric layers 13 are formed on the substrate 10;
[0041] Then, if Figure 2b As shown, the pixel electrode layer 111 is covered on the substrate 10, and the pixel electrode layer 111 buries the dielectric layer 13 inside;
[0042] Next, if Figure 2c As shown, a patterned photoresist layer 14 is formed on the pixel electrode layer 111, and the patterned photoresist layer 14 is used as a mask to etch the pixel electrode layer 111 to form a pixel electrode on the dielectric layer 13. 11, and an opening 15 exposing the top surface of the substrate 10 is formed between two adjacent pixel electrodes 11, wherein, due to the influence of the etching process, the opening 15 between adjacent two pixel electrodes 11 The top width is greater than the bottom widt...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention provides a silicon-based liquid crystal device, a manufacturing method thereof and a silicon-based liquid crystal display panel. The silicon-based liquid crystal device comprises: a substrate; at least two pixel electrodes which are arranged on the substrate, wherein the tops of the side walls of every two adjacent pixel electrodes are close to each other relative to the bottom; andan insulating barrier layer which is positioned on the substrate and is filled between the side walls of the two adjacent pixel electrodes, so as to enable the two adjacent pixel electrodes to be isolated from each other through the insulating barrier layer. According to the technical scheme, stray light can be prevented from being reflected into the silicon-based liquid crystal optical system bythe silicon-based liquid crystal device, so that the contrast ratio of an image is prevented from being reduced, the light reflectivity is improved, and the display effect of the silicon-based liquidcrystal display panel is improved.
Description
technical field [0001] The invention relates to the field of liquid crystal display, in particular to a silicon-based liquid crystal device, a manufacturing method thereof, and a silicon-based liquid crystal display panel. Background technique [0002] Liquid Crystal on silicon (LCOS) display panel is a reflective liquid crystal miniature panel, which uses semiconductor silicon crystal technology to control liquid crystal and then "projects" color images, with high light utilization efficiency, small size, and high aperture ratio , mature manufacturing technology and other characteristics, it can easily achieve high resolution and full color performance. [0003] A liquid crystal on silicon display panel usually includes a liquid crystal on silicon device and a transparent cover, and the liquid crystal on silicon device and the transparent cover are bonded together by a frame glue, and the liquid crystal material is encapsulated inside. Among them, the structure and perform...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G02F1/1333G02F1/1343G02F1/1335
CPCG02F1/1333G02F1/133345G02F1/134309G02F1/133512
Inventor 范纯圣
Owner HUA WEI SEMICONDUCTOR (SHANGAHAI) CO LTD