Liquid crystal-on-silicon device, method for manufacturing the same, and liquid-crystal-on-silicon display panel
A technology of silicon-based liquid crystals and manufacturing methods, which is applied in the direction of instruments, nonlinear optics, optics, etc., can solve problems affecting the display effect of silicon-based liquid crystal display panels, image contrast reduction, etc., to achieve improved display effects, increased light reflectivity, Avoid the reduced effect
Active Publication Date: 2022-06-17
HUA WEI SEMICONDUCTOR (SHANGAHAI) CO LTD
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Problems solved by technology
[0004] Wherein, in the process of forming the pixel electrode on the substrate, due to the influence of the etching process, the width of the top of the gap between two adjacent pixel electrodes is greater than the width of the bottom, which will cause light to enter the gap. After the insulating barrier layer reaches the surface of the pixel electrode on the side wall of the gap, the light is reflected, which causes stray light to reflect upwards and enter the optical system of the liquid crystal on silicon substrate, thereby reducing the contrast of the image and affecting the display of the liquid crystal on silicon display panel Effect
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[0038] see Figures 2a to 2f , a manufacturing method of a silicon-based liquid crystal device is as follows:
[0039] First, as Figure 2a As shown, a substrate 10 is provided, and a plurality of periodically arranged dielectric layers 13 are formed on the substrate 10;
[0040] Then, as in Figure 2b As shown, the pixel electrode layer 111 is covered on the substrate 10, and the pixel electrode layer 111 is buried in the dielectric layer 13;
[0041] Then, as Figure 2c As shown, a patterned photoresist layer 14 is formed on the pixel electrode layer 111 , and the patterned photoresist layer 14 is used as a mask to etch the pixel electrode layer 111 to form a pixel electrode on the dielectric layer 13 11, and an opening 15 exposing the top surface of the substrate 10 is formed between two adjacent pixel electrodes 11, wherein, due to the influence of the etching process, the opening 15 between the adjacent two pixel electrodes 11 is The top width is greater than the bot...
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The invention provides a liquid crystal on silicon device and its manufacturing method and a liquid crystal on silicon display panel. The liquid crystal on silicon device comprises: a substrate; at least two pixel electrodes arranged on the substrate and adjacent to each other The tops of the sidewalls of the two pixel electrodes are close to the bottom; and an insulating barrier layer is located on the substrate and filled between the sidewalls of two adjacent pixel electrodes, so that two adjacent pixel electrodes The pixel electrodes are separated by the insulating barrier layer. The technical solution of the present invention enables the liquid crystal on silicon device to avoid the reflection of stray light into the liquid crystal on silicon optical system, thereby avoiding reducing the contrast of the image, and improving the light reflectivity, thereby improving the display effect of the liquid crystal on silicon display panel promote.
Description
technical field [0001] The present invention relates to the field of liquid crystal display, in particular to a silicon-based liquid crystal device and a manufacturing method thereof, and a silicon-based liquid crystal display panel. Background technique [0002] Liquid Crystal on Silicon (LCOS) display panel is a reflective liquid crystal micro-panel, which uses semiconductor silicon crystal technology to control liquid crystal and then "project" color images, with high light utilization efficiency, small size and high aperture ratio , mature manufacturing technology and other characteristics, it can easily achieve high resolution and full color performance. [0003] A liquid crystal-on-silicon display panel generally includes a liquid crystal-on-silicon device and a transparent cover plate, and the liquid crystal-on-silicon device and the transparent cover plate are bonded together by a sealant, and the liquid crystal material is encapsulated therein. Among them, the stru...
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IPC IPC(8): G02F1/1333G02F1/1343G02F1/1335
CPCG02F1/1333G02F1/133345G02F1/134309G02F1/133512
Inventor 范纯圣
Owner HUA WEI SEMICONDUCTOR (SHANGAHAI) CO LTD