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Tape pasting device

A sticking device, tape and roll technology, applied in transportation and packaging, thin material handling, winding strips, etc., can solve the problems of wrong order and path, complicated and other problems

Inactive Publication Date: 2020-03-31
DISCO CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] However, in the pasting device shown in Patent Document 1, when replacing the roll itself wound by the tape or when the tape is broken, it is necessary for the operator to pass the tape through each conveyance device according to a preset order and path. unit
In this case, in the pasting device shown in Patent Document 1, there are many conveying units to pass through, so the work of passing the tapes in a predetermined order and route is very complicated, and the order and route of passing the tapes may be mistaken.

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0021] A tape sticking device according to Embodiment 1 of the present invention will be described with reference to the drawings. figure 1 It is a side sectional view schematically showing the outline structure of the tape sticking apparatus of Embodiment 1. figure 2 It is a perspective view of the tape stuck to the workpiece by the tape sticking device of Embodiment 1. image 3 is along figure 2 Sectional view of line III-III. Figure 4 is schematically shown figure 1 Perspective view of the 2nd roller pair of the tape applicator shown. Figure 5 is schematically shown figure 1 Side sectional view of the detection display unit with the tape sticking device shown.

[0022] Embodiment 1 figure 1 The shown tape sticking device 1 is a device for sticking a tape 200 to the back surface 101 which is one side of the workpiece 100 . In Embodiment 1, the workpiece 100 to which the tape 200 is attached by the tape applying apparatus 1 is a wafer such as a disc-shaped semicond...

Embodiment approach 2

[0060] A tape sticking device according to Embodiment 2 of the present invention will be described with reference to the drawings. Figure 8 It is a side cross-sectional view schematically showing the detection and display unit of the tape application device according to the second embodiment. in addition, Figure 8 In , the same parts as those in Embodiment 1 are denoted by the same reference numerals and explanations thereof are omitted.

[0061] In the tape sticking device 1 according to Embodiment 2, the control unit 90, in both the setting operation of the tape 200 and the sticking operation of the tape 200, changes the received light amount of the light 300 received by the light receiving element 87, that is, a signal indicating the received light amount. It is the same as Embodiment 1 except that the deviation of the belt 200 relative to the normal path 72 which is the detection and display unit 80 is detected. Specifically, in both the setting operation of the tape 2...

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PUM

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Abstract

Provided is a tape pasting device capable of easily setting a tape according to a preset path. A tape pasting device (1) is provided with: a feeding means (20) for feeding a tape (200); a pasting unit(40) which pastes the belt (200) on the processed object (100); a cutting means (50) for cutting the tape (200); a tape winding means (60) for winding the tape (200); and a plurality of conveyance rollers (70) that convey the tape (200), the tape pasting device (1) having, on a path (72) on which the tape (200) is provided: a plurality of sensors that detect the presence or absence of the tape (200); and a plurality of lamps that are turned on by a control unit (90) in accordance with signals from the sensors. When the tape (200) is installed, the control unit (90) lights up a lamp installedat a position where the tape should pass therethrough in response to a signal from the sensor.

Description

technical field [0001] The present invention relates to a tape sticking device for sticking a protective tape on one surface of a workpiece such as a semiconductor wafer. Background technique [0002] When attaching a tape such as a protective tape to a workpiece such as a semiconductor wafer, it is necessary to apply tension to the tape so that the tape does not wrinkle. The winding unit is constituted by a plurality of rollers (for example, refer to Patent Document 1). [0003] Patent Document 1: Japanese Patent Laid-Open No. 2015-82642 [0004] However, in the pasting device shown in Patent Document 1, when replacing the roll itself wound by the tape or when the tape is broken, it is necessary for the operator to pass the tape through each conveyance device according to a preset order and path. unit. In this case, in the pasting device shown in Patent Document 1, there are many conveying units to pass through, so the work of passing the tapes in a predetermined order a...

Claims

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Application Information

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IPC IPC(8): B65H37/04B65H35/06B65H23/26B65H20/02
CPCB65H37/04B65H35/06B65H23/26B65H20/02H01L21/67132H01L24/50H01L21/67092H01L21/67259
Inventor 柿沼良典右山芳国椙浦一辉
Owner DISCO CORP