Vacuum coater for amorphous silicon solar sheets

Abstract

The invention discloses a vacuum coater for amorphous silicon solar sheets, and belongs to the field of vacuum coating equipment. The vacuum coater comprises a vacuum pump set, vacuum coating cavitiesand heating pipes, wherein the heating pipes are distributed on the peripheries of the vacuum coating cavities; vacuum pressure detectors are arranged on the vacuum coating cavities; the vacuum pumpset communicates with the vacuum coating cavities and consists of a sliding valve pump, a Roots pump, molecular pumps, a molecular pump forepump and large valves; the sliding valve pump and the Rootspump are sequentially connected in series and connected to the large valves; the molecular pump forepump is connected with the molecular pumps; the molecular pumps are arranged at the bottoms of the large valves and communicate with the large valves; a first electric control valve is arranged between the sliding valve pump and the Roots pump; second electric control valves are arranged among the Roots pump and the large valves; and the large valves communicate with the vacuum coating cavities. According to the vacuum coater, the vacuum coating cavities are vacuumized ultimately and kept in theultimate vacuum state through the alternate switching of the vacuum pump set, so that the production cost of products is reduced, and the product quality is improved.

Description

technical field [0001] The invention relates to the field of vacuum coating equipment, in particular to a vacuum coating device for amorphous silicon solar panels. Background technique [0002] With the frequent shortage of existing energy such as coal and oil and the deterioration of the ecological environment, human beings have to find new clean energy and renewable resources as soon as possible. These include water energy, wind energy and solar energy, and solar energy will become one of the most important energy sources in the 21st century due to its huge reserves, safety, and cleanliness. The sun is a huge energy source, about half of the power it radiates is intercepted by the earth, and about half of this energy passes through the atmosphere to reach the ground, and can receive about 1kw on every square meter of the earth's surface facing the sun Amorphous silicon solar cells refer to devices that convert light energy into electrical energy through the photoelectri...

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Problems solved by technology

[0004] The invention provides a vacuum coating device for amorphous silicon solar panels to solve the technical problem in the prior art that the vacuum strength in the sealed cavity is not high enough during the vacuum coating process for amorphous silicon solar panels

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