Absolute inspection method for synchronous measurement of multiple spherical standard lenses

Abstract

The invention discloses an absolute inspection method for synchronous measurement of multiple spherical standard lenses. The method comprises the following steps of arranging three spherical lenses, namely A, B and C; taking the spherical surface B as a reference surface, taking the spherical surface A as a test surface, and performing primary interference measurement; using the spherical surfaceB as a reference surface, and using the spherical surface A as a test surface after rotating anticlockwise for 90 degrees around a shaft for primary interference measurement; enabling the spherical surface C to serve as a reference surface, enabling the spherical surface A to keep the position during first measurement to serve as a test surface, and carrying out primary interference measurement; taking the spherical surface C as a reference surface, taking the spherical surface B as a test surface, and performing primary interference measurement; and integrating measurement results, decomposing to obtain odd-even function items of the spherical surfaces A, B and C by utilizing odd-even function decomposition and a Fourier series frequency selection method, and obtaining respective absolutesurface shape distribution of the spherical surfaces A, B and C. The method is low in measurement frequency, simple, feasible, accurate and efficient, and measurement results can ensure information of respective surface shapes at all frequencies as much as possible.

Description

technical field [0001] The invention belongs to the technical field of optical interference measurement, in particular to an absolute inspection method for synchronous measurement of a plurality of spherical standard lenses. Background technique [0002] In interference detection, the accuracy of surface error detection is mainly affected by the quality of the reference surface. In order to obtain the absolute surface error distribution information of the measured surface, the existing solutions are as follows: First, provide a reference surface with higher surface accuracy, such as using a point diffraction interferometer to produce a reference surface close to an ideal spherical surface. This method requires additional It is very difficult to build a point diffraction interferometer; the second is to calibrate the reference surface error and separate the influence of the reference surface error to improve the detection accuracy, that is, the absolute inspection technology....

AI Technical Summary

Problems solved by technology

In 2008, Schreiner et al. used parity and even item decomposition to complete the surface shape detection combined with the cat's eye position of the two spheres, and realized the surface shape splicing, but the cat's eye position detection brought new aberrations

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