Large-aperture convex free-form surface mirror lens shape detection system and method thereof

Abstract

The invention discloses a large-aperture convex free-form surface mirror lens shape detection system and a method thereof, and belongs to the technical field of advanced optical systems. According tothe invention, a curved surface computer-generated hologram is combined with a spherical mirror to complete zero compensation of the free-form surface mirror. In order to realize accurate alignment ofan interferometer, a curved surface computer-generated hologram, a spherical mirror and a to-be-detected convex free-form surface mirror in a detection light path, a corresponding functional area isdesigned on the curved surface computer-generated hologram, wherein the curved surface computer-generated hologram comprises an interferometer alignment area of a convex surface part, a main detectionarea of a concave surface part, a projection cross curve area, a spherical mirror alignment area and other diffraction areas; the above areas are combined to jointly guarantee accurate alignment of each optical element in the detection light path and measurement and acquisition of a lens shape result of the free-form surface. The method has the advantages of high detection precision, simple detection site environment and size requirements and the like, and provides guarantee for manufacturing and development of modern advanced optical systems.

Description

technical field [0001] The invention belongs to the technical field of advanced optical systems, and more specifically relates to a mirror surface shape detection system and method of a large-diameter convex free-form surface mirror. Background technique [0002] The freeform surface has the advantages of improving the image quality of the optical system, increasing the degree of freedom in the design of the optical system, and simplifying the structure of the optical system. It is the core component of the modern optical system. Wide range of applications. In view of the advantages and wide application of free-form optical components, the mirror surface shape that does not meet the precision requirements will seriously affect the performance of the optical system. For example, it will not be possible to obtain good image quality for imaging systems, and it will be difficult to obtain super High-resolution, etc., the high-precision measurement of the surface shape of its co...

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Problems solved by technology

[0004] Aiming at the defects of the prior art, the purpose of the present invention is to provide a large-diameter convex free-form mirror mirror surface shape detection system and method, aiming at solving the problem of low detection accuracy of the mirror surface shape of the large-diameter convex free-form mirror

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