Display backboard, preparation method thereof and display device
A technology for display backplanes and substrates, which is applied to semiconductor devices, electrical components, circuits, etc., can solve the problems that OLED display backplanes need to be improved and affect the performance of OLED display backplanes.
Active Publication Date: 2020-04-10
BOE TECH GRP CO LTD
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Problems solved by technology
However, the metal oxide semiconductor thin film transistor (thin film transistor) in the OLED display backplane that can realize optical compensation obtained in the related art is basically in a state of high current, and the photosensitive device also has a large dark current (that is, the display device The current in the photosensitive device in the dark state), and it is difficult to restore to the original state through other processes, which seriously affects the performance of the OLED display backplane
[0003] Therefore, the current OLED display backplane related technology still needs to be improved
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[0037] Embodiments of the present invention are described in detail below. The embodiments described below are exemplary only for explaining the present invention and should not be construed as limiting the present invention. If no specific technique or condition is indicated in the examples, it shall be carried out according to the technique or condition described in the literature in this field or according to the product specification. The reagents or instruments used were not indicated by the manufacturer, and they were all commercially available conventional products.
[0038] The present invention is based on the following discoveries and recognitions of the inventors:
[0039]During the research process, the inventors found that after the introduction of optically compensated photosensitive devices, the thin film transistors in the display backplane, especially the oxide thin film transistors (that is, the active layer is a metal oxide semiconductor material), are basi...
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The invention provides a display backboard, a preparation method thereof and a display device. The display backboard comprises a substrate; a thin film transistor structure layer which is arranged atone side of the substrate and comprises a plurality of thin film transistors, a gate insulating layer and an interlayer dielectric layer. The etching rate of the interlayer dielectric layer is smallerthan that of photosensitive devices, and the photosensitive devices are arranged at the side, away from the substrate, of the thin film transistor structure layer at intervals. In the display backboard, the density of the interlayer dielectric layer is relatively higher; when the photosensitive devices are formed, the interlayer dielectric layer can effectively prevent H from entering an activelayer of the thin film transistor to enable the active layer to be conductive, so that the problem that the thin film transistor is basically in a large-current state after the photosensitive devicesare formed can be avoided, and the better optical characteristics of the thin film transistor can be ensured while the optical compensation is realized.
Description
technical field [0001] The present invention relates to the field of display technology, in particular, to a display backplane, a preparation method thereof, and a display device. Background technique [0002] After a long period of development, OLED display products have become increasingly mature, and have developed rapidly recently, and have gradually appeared in terminal products. At present, there are still some technical difficulties in OLED, such as compensation methods. The common compensation method is electrical compensation, but due to the limited effect of electrical compensation, an optical compensation method is proposed. Specifically, a photosensitive device is added to the pixel to sense the intensity of OLED light emission, and the signal detected by the photosensitive device is fed back to OLED. corresponding compensation. However, the metal oxide semiconductor thin film transistor (thin film transistor) in the OLED display backplane that can realize opti...
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Patent Timeline
Login to View More IPC IPC(8): H01L27/12H01L27/32
CPCH01L27/1214H01L27/1248H10K59/60H10K59/13H10K59/126H10K59/1213H01L31/105H01L31/18H10K59/124H10K59/1201
Inventor 贺家煜刘雪李正亮
Owner BOE TECH GRP CO LTD