Display backplane, preparation method thereof, and display device
A technology for display backplanes and substrates, applied in semiconductor devices, electrical components, circuits, etc., can solve the problems affecting the performance of OLED display backplanes and the need for improvement of OLED display backplanes.
Active Publication Date: 2022-08-09
BOE TECH GRP CO LTD
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Problems solved by technology
However, the metal oxide semiconductor thin film transistor (thin film transistor) in the OLED display backplane that can realize optical compensation obtained in the related art is basically in a state of high current, and the photosensitive device also has a large dark current (that is, the display device The current in the photosensitive device in the dark state), and it is difficult to restore to the original state through other processes, which seriously affects the performance of the OLED display backplane
[0003] Therefore, the current OLED display backplane related technology still needs to be improved
Method used
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[0037] Embodiments of the present invention are described in detail below. The embodiments described below are exemplary, only for explaining the present invention, and should not be construed as limiting the present invention. If no specific technique or condition is indicated in the examples, the technique or condition described in the literature in the field or the product specification is used. The reagents or instruments used without the manufacturer's indication are conventional products that can be obtained from the market.
[0038] The present invention is completed based on the following findings and cognitions of the inventors:
[0039]During the research process, the inventor found that after the introduction of optically compensated photosensitive devices, the thin film transistors in the display backplane, especially the oxide thin film transistors (that is, the active layer is made of metal oxide semiconductor materials) are basically in a state of high current,...
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Abstract
The present invention provides a display backplane, a preparation method thereof, and a display device. The display backplane comprises: a substrate; An insulating layer and an interlayer dielectric layer, and the etching rate of the interlayer dielectric layer is lower than that of a plurality of photosensitive devices, and the plurality of photosensitive devices are arranged at intervals on the side of the thin film transistor structure layer away from the substrate. In the display backplane, the density of the interlayer dielectric layer is high. When forming a photosensitive device, the interlayer dielectric layer can effectively block H from entering the active layer of the thin film transistor and make the active layer conductive, thereby avoiding the formation of photosensitive devices. The problem that the thin film transistor is basically in a state of large current after the device can ensure that the optical characteristics of the thin film transistor are better while realizing optical compensation.
Description
technical field [0001] The present invention relates to the field of display technology, in particular, to a display backplane, a preparation method thereof, and a display device. Background technique [0002] After a long period of development, OLED display products have become more and more mature, and have developed rapidly recently, and have gradually appeared in terminal products. At present, OLED still has some technical difficulties, such as compensation method. The common compensation method is electrical compensation, but due to the limited effect of electrical compensation, an optical compensation method is now proposed. Specifically, a photosensitive device is added to the pixel to sense the intensity of OLED light emission, and the signal detected by the photosensitive device is fed back to the OLED. corresponding compensation. However, the metal oxide semiconductor thin film transistors (thin film transistors) in the OLED display backplane that can realize opt...
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IPC IPC(8): H01L27/12H01L27/32
CPCH01L27/1214H01L27/1248H10K59/60H10K59/13H10K59/126H10K59/1213H01L31/105H01L31/18H10K59/124H10K59/1201
Inventor 贺家煜刘雪李正亮
Owner BOE TECH GRP CO LTD