Real-time monitoring device for convex surface grinding frequency of piezoelectric quartz wafer

Abstract

The invention provides a real-time monitoring device for the convex surface grinding frequency of a piezoelectric quartz wafer, which comprises an ejector pin. The ejector pin is connected to a driving mechanism; a pin head is arranged at the lower part of the ejector pin; the pin head abuts against a metal tool disc used for carrying a wafer to be processed; the pin head is connected with a signal input end of a test electrode wire; the test electrode wire is wound on the ejector pin above the pin head; a signal output end of the test electrode wire is connected with a frequency measuring instrument; and the frequency measuring instrument is connected with a grinding controller. Thus, the frequency signal is applied to resonate with the inherent piezoelectric frequency of the wafer, the piezoelectric frequency of the wafer is resonated, a monitoring signal is monitored in real time through the pin head and transmitted to the frequency measuring instrument through the test electrode wire, a frequency value is measured and then fed back to the grinding controller, when the frequency reaches a set target frequency, the grinding controller controls grinding to be stopped, frequency detection and feedback always penetrate through the whole grinding process, and therefore real-time monitoring of the convex face grinding frequency is achieved.

Description

technical field [0001] The invention relates to the technical field of quartz wafers, in particular to a real-time monitoring device for the grinding frequency of a piezoelectric quartz wafer convex surface. Background technique [0002] Generally, during the production process of quartz wafer grinding, the grinding disc is constantly sliding relative to the quartz wafer, and the quartz wafer does not always exist under the probe head, and the resonance signal is intermittent; in addition, the RF excitation power required by different frequencies of quartz wafers is different. Yes, the amplitudes of resonance signals in different frequency bands are also different, and it is impossible to monitor the grinding frequency of quartz wafers. Contents of the invention [0003] The technical problem to be solved by the present invention is to provide a real-time monitoring device for the grinding frequency of the convex surface of the piezoelectric quartz wafer, which solves the ...

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Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a real-time monitoring device for the grinding frequency of the convex surface of the piezoelectric quartz wafer, which solves the problem that the grinding frequency of the quartz wafer cannot be monitored in the related art

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