Flexible variable-mode sensor for physiological information monitoring, application and preparation method

Abstract

The invention belongs to the field of sensors, and discloses a flexible variable-mode sensor for physiological information monitoring, an application and a preparation method. The sensor includes a substrate and an upper electrode layer, a piezoelectric layer, and a lower electrode layer arranged under the substrate in sequence, wherein: the upper / lower electrode layer includes three parts of electrodes, the first part of electrodes forms a closed serpentine shape, the second part and the second part The three parts have the same structure and are in the shape of a sensitive grid, distributed on both sides of the first pin, and the angle between the second part and the third part is 90 degrees. The piezoelectric layer has the same electrode structure as the first part; the upper / lower electrode layer It can be used as a resistive sensor, and when measuring the voltage or capacitance between the first pin on the upper electrode layer and the first pin on the lower electrode layer, it can be used as a piezoelectric sensor and a capacitive sensor respectively. Through the present invention, the measurement of multiple physical quantities under different sensing modes is realized, the requirement for the number of interfaces is effectively reduced, and the system cost is reduced.

Description

technical field [0001] The invention belongs to the field of sensors, and more specifically relates to a flexible variable-mode sensor for physiological information monitoring, an application and a preparation method. Background technique [0002] Existing flexible sensors have relatively single functions, and multifunctional flexible sensors are usually realized by superimposing and distributing each functional module unit. The current arrangement of multi-modal sensing units can be divided into three types: [0003] 1) Arrangement 1: The same type of sensing units are integrated by area, and sensors with different functions are integrated in different areas. This arrangement of sensing units is not suitable for skin electronic systems in which various types of sensing units need to be evenly distributed. For example, the epidermal electronic system proposed in the article "Kim D H, Lu N, Ma R, et al. Epidermal electronics[J].science, 2011, 333(6044): 838-843." has strain ...

AI Technical Summary

Problems solved by technology

This kind of sensor distribution can solve the shortcomings of the second arrangement method, which occupies a large area and is not easy to be highly integrated. However, stacking multi-layer sensing units in the thickness direction has the disadvantages of complex process and multi-fold increase in thickness, resulting in The flexibility is greatly reduced. For example, the invention patent CN201711385291.0 proposes a multi-modal tactile sensing device. The device uses the same type of sensors to be evenly distributed in the same plane, and the planes where different sensors are located are superimposed.

It includes image acquisition sensors, multi-array shock sensors, light emitters, and temperature sensors. There are as many as 25 multi-array shock sensors in a single device. Light emitters and temperature sensors also occupy physical space and system resources separately, and the thickness of the device is large (non-flexible). , and the interface and leads are more complex

[0006] The above three arrangements have a common defect: the total number of ports and leads of the sensing unit is the sum of the number of ports and leads of each sensing unit, so in high-density integration, it will take up a lot of hardware resources and layout. Line layout is very difficult

[0007] In short, with the continuous increase in the number of sensing and excitation modules, the ratio of the number of functions of the flexible sensor to the number of functional layers (or leads) is low, resulting in a high burden of system resources for the flexible sensor to realize all functions, and a high degree of complexity in the device preparation process. , the space utilization rate of the sensor device is low, the burden of the hardware circuit is large, and the cost is higher. How to realize the efficient integration of multiple sensing excitation units can simultaneously realize the enrichment of device functions, simplification of the process, simplification of wiring ports, and improvement of the device. Space utilization realizes the multi-purpose of the sensor, uses the combination of sensing functions of different sensing principles in the same sensor to improve the measurement accuracy and measurement stability of the same physical quantity to be measured, reduces the redundancy of the sensor, and achieves flexible electronics for the object to be measured The target requirement of health monitoring is the research goal of this patent

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