Method for realizing graph edge cutting or expanding in LDI exposure

Abstract

The invention relates to the field of maskless exposure, in particular to a method for realizing graph edge cutting or extension in LDI (Laser Direct Imaging) exposure, which comprises the following steps of: S1, setting the number N of pixels for edge cutting or extension of each edge in a polygon, and distinguishing edge cutting or extension; S2, filling the to-be-processed image data into a lattice diagram, and sending the lattice diagram to a processing module; S3, obtaining a data value of each row and each column according to the lattice diagram information; wherein the edge cutting adopts corresponding row and column translation phases and obtains pixel point values of corresponding positions, the expansion adopts corresponding row and column translation phases or obtains pixel point values of corresponding positions, and the original polygon is filled into the lattice diagram, so that the problem of common edges of the diagram is solved. By utilizing the AND / OR operation of twoadjacent points, the purpose that the polygon reduces one pixel inwards or expands one pixel outwards is achieved, and in order to realize the reduction or expansion of a plurality of pixels, the result only needs to be operated for multiple times.

Description

technical field [0001] The invention relates to the field of maskless exposure, in particular to a method for realizing graphic edge trimming or expansion in LDI exposure. Background technique [0002] At present, LDI exposure technology is divided into step exposure, direct scanning exposure, and oblique scanning exposure. Among them, oblique exposure technology has the characteristics of high exposure efficiency and high resolution, and has become the preferred exposure method of LDI. However, there is a problem with oblique exposure: in the case of positive polarity exposure, the edge of the figure broadens, and the greater the exposure energy, the more obvious the broadening; in negative polarity exposure, the problem of shrinking the edge of the figure, and the greater the exposure energy, the more obvious the reduction. In order to obtain the graphics of the size required by the customer, it is necessary to perform certain processing on the exposed graphics before expo...

AI Technical Summary

Problems solved by technology

However, there is a problem with oblique exposure: in positive polarity exposure, the edge of the figure broadens, and the greater the exposure energy, the more obvious the broadening; in negative polarity exposure, the edge of the figure shrinks, and the greater the exposure energy, the more obvious the reduction

However, when the graphics are complex and the number is huge, the data processing volume of the merging algorithm is very large, the processing efficiency is very low, and the real-time processing of data is not used.

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