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MEMS integrated microwave standing wave meter with tunable frequency state and preparation method thereof

A technology for tuning frequency and standing wave meter, which is applied in the field of MEMS integrated microwave standing wave meter and its preparation. , to meet the effect of standing wave ratio measurement

Active Publication Date: 2020-04-21
SOUTHEAST UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the existing standing wave meters have the disadvantages of large size, active detection, and single operating frequency, and cannot meet the needs of online integrated measurement

Method used

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  • MEMS integrated microwave standing wave meter with tunable frequency state and preparation method thereof
  • MEMS integrated microwave standing wave meter with tunable frequency state and preparation method thereof
  • MEMS integrated microwave standing wave meter with tunable frequency state and preparation method thereof

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Embodiment Construction

[0033] specific implementation plan

[0034] The specific implementation scheme of the MEMS integrated microwave standing wave meter of the tunable frequency state of the present invention is as follows:

[0035] The MEMS integrated microwave standing wave meter with tunable frequency state adopts silicon as the substrate 15, on which CPW1, ACPS2, four identical MEMS variable capacitors 7, pressure welding blocks 8, connecting wires 9, air Bridge 5 and two identical MEMS microwave power sensors 13:

[0036] The four sections of CPW1 transmission lines are placed horizontally on the silicon substrate 15, serving as the microwave input end 17 and the output end 18 of the MEMS integrated microwave standing wave meter, for realizing the transmission of microwave signals. CPW1 is composed of a signal line and two ground lines, and the ground lines are located on both sides of the signal line. In order to realize the microwave matching between the port and the outside world, the p...

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Abstract

The invention discloses an MEMS integrated microwave standing wave meter with a tunable frequency state, which is formed by adopting a fully passive structure. A coupling port and an isolation port ofan orthogonal directional coupler are respectively connected with a thermoelectric MEMS microwave power sensor to measure the microwave power coupled to the coupling end and the isolation end respectively, and the incident microwave power and the reflected microwave power can be obtained, so that a miniature thermoelectric MEMS integrated microwave standing wave meter is formed. In a detection state, only a small part of input power is coupled, and most of the power is still available, so that the function of online detection of the standing-wave ratio is realized; four identical MEMS variable capacitors increase the electrical length of a straight-through arm and a coupling arm so as to reduce the size of a chip, and the capacitance value can be continuously changed based on the electrostatic principle to continuously tune the center frequency. Therefore, the MEMS integrated microwave standing wave meter provided by the invention has the characteristics of miniaturization, zero direct current power consumption, tunable working frequency state and online detection of the standing-wave ratio.

Description

technical field [0001] The invention provides a MEMS integrated microwave standing wave meter with tunable frequency state and a preparation method thereof, belonging to the technical field of micro-electro-mechanical systems (MEMS). Background technique [0002] Microwave standing wave meter is a key component of microwave system module self-testing application, and microwave standing wave meter with tunable frequency state has important research and application value in reconfigurable microwave system. The microwave standing wave meter mainly includes two parts: one is the extraction part of the microwave signal, and the other is the detection part of the extracted microwave signal. For the extraction part of the microwave signal, it can be divided into structures based on multi-port ring junction, sampling transmission line and directional coupler; for the detection part of the extracted microwave signal, structures such as diodes, logic circuits and thermistors are usu...

Claims

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Application Information

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IPC IPC(8): G01R29/08G01R21/02B81B7/02B81B7/00B81C1/00B81C3/00
CPCB81B7/007B81B7/02B81C1/00301B81C3/001B81C2203/0707G01R21/02G01R29/0878
Inventor 张志强刘佳琦黄晓东
Owner SOUTHEAST UNIV
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