A carrier plate for mass transfer, mass transfer device and method thereof
A technology of a transfer device and a transfer method, which is applied in the field of mass transfer and can solve the problems of small size and difficult adjustment of micro-device spacing.
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[0036] In order to make the object, technical solution and advantages of the present invention more clear and definite, the present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0037] Please also see Figure 1-Figure 6 , the present invention provides some embodiments of a mass transfer carrier.
[0038] like figure 1 As shown, a carrier plate 10 for mass transfer of the present invention includes: a temperature control device 11, a telescopic plate 12 located on the temperature control device 11, and a first adhesive layer 13 disposed on the telescopic plate 12 The temperature control device 11 is used to control the temperature of the telescopic plate 12, and the telescopic plate 12 is used to expand and contract according to temperature changes, so as to a...
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