Ion source device and movable radio frequency scanning ion equipment
A technology of ion source and radio frequency ion source, applied in the field of radio frequency ion source, can solve the problems of too many connections between radio frequency matching network and radio frequency ion source, complex structure, etc.
Pending Publication Date: 2020-04-24
ZHONGSHAN IBD TECH CO LTD
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Problems solved by technology
[0004] The purpose of this application is to solve one of the above-mentioned technical defects, that is, there are too many connections between the existing radio frequency matching network and the radio frequency ion source, and the problem of complex structure
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[0028] Embodiments of the present application are described in detail below, examples of which are shown in the drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the figures are exemplary only for explaining the present application, and are not construed as limiting the present application.
[0029] Those skilled in the art will understand that unless otherwise stated, the singular forms "a", "an", "said" and "the" used herein may also include plural forms. It should be further understood that the wording "comprising" used in the description of the present application refers to the existence of the stated features, integers, steps, and operations, but does not exclude the existence or addition of one or more other features, integers, steps, and operations.
[0030] Those skilled in the art can understand that, unless otherwise ...
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The invention relates to an ion source device and movable radio frequency scanning ion equipment. The ion source device comprises a radio frequency matching network and a radio frequency ion source, wherein the radio frequency matching network is a matching network of an n-shaped structure. The input end of the radio frequency matching network is connected with a radio frequency source, and the output end of the radio frequency matching network is connected to one end of a radio frequency coil of the radio frequency ion source. The other end of the radio frequency coil of the radio frequency ion source is grounded. A radio frequency source is connected to the radio frequency matching network through the input end, the radio frequency source is transmitted to the radio frequency coil of theradio frequency ion source through the output end, the radio frequency coil ionizes gas entering an ionization chamber through a gas pipeline to generate ions, and ion beams are generated under the drive of a screen grid mesh. The structure of the radio frequency matching network of the ion source device is simplified, and the ion source device is convenient to move and use. According to the movable radio frequency scanning ion equipment, the ion source can be conveniently moved to realize scanning processing of a mirror surface, and the use effect of the radio frequency scanning ion equipment is improved.
Description
technical field [0001] The present application relates to the technical field of radio frequency ion sources, in particular, the present application relates to an ion source device and movable radio frequency scanning ion equipment. Background technique [0002] Ion source technology is an applied science and technology with wide application, many types, many sciences involved, strong process technology, and very rapid development. It is currently used in many fields. For example, ion beam polishing has been introduced into the field of optical processing due to its higher processing certainty. The ion beam polishing method needs to be applied under vacuum conditions, and the material removal rate caused by the sputtering effect is relatively low. The ion beam polishing method is more suitable for the final stage of optical processing to achieve higher precision or final processing goals. For workpieces with a large size, it is necessary to move the ion source to realize th...
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IPC IPC(8): H01J37/08H01J37/30
CPCH01J37/08H01J37/30
Inventor 刘伟基冀鸣赵刚易洪波曾文华刘运鸿吴秋生范奕生
Owner ZHONGSHAN IBD TECH CO LTD