Method and device for fast adjustment of optical path for zero-position compensation detection of concave oblate spherical plane wavefront
A technology of plane wave front and detection optical path, which is applied in measurement devices, optical devices, optics, etc., can solve problems such as difficulty in adjusting the detection optical path, and achieve the effect of realizing convenience and improving processing and detection efficiency.
Active Publication Date: 2021-05-07
CHANGGUANG SATELLITE TECH CO LTD
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Problems solved by technology
[0005] The present invention mainly solves the problem of difficulty in adjusting the optical path of the compensation and detection optical path of the plane wavefront zero lens of the concave oblate spherical optical aspheric surface, and proposes a method and device for quickly adjusting the detection optical path from the optical principle, so as to improve the detection efficiency and ensure the smooth development of the processing of optical components
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specific Embodiment approach 1
[0028] Specific implementation mode one: based on image 3 and Figure 4 principle shown, refer to Figure 5 The detection optical path system shown, Figure 6 The specific detection optical path adjustment method flow chart of the specific implementation is as follows:
[0029] A method for quickly adjusting the optical path of a concave oblate spherical plane wavefront compensation detection optical path described in this embodiment specifically includes the following steps:
[0030] (1) Adjust the first five-dimensional adjustment frame 16 so that the light beam emitted by the interferometer plane window 7 is parallel to the test reference platform 15;
[0031] (2) adjust the second five-dimensional adjustment frame 17, align the first mirror 8 of the planar wavefront compensator and the second mirror 9 of the planar wavefront compensator with the axis of the interferometer plane window 7;
[0032] (3) Place the reflector 6 to be checked;
[0033] (4) According to the ...
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The present invention proposes a method and device for quickly adjusting the optical path of a plane wavefront zero compensation detection on a concave oblate spherical surface. The method makes the outgoing beam of the plane window of the interferometer parallel to the test reference platform; the first mirror of the plane wavefront compensator and the second plane wavefront compensator Mirror is aligned with the axis of the interferometer plane window; according to the light beam converging point P1 on the observation screen near the optical axis of the mirror to be inspected, the pitch angle and tilt angle of the mirror to be inspected are adjusted by the third five-dimensional adjustment frame, and the The third five-dimensional adjustment frame adjusts the front and rear distance of the mirror to be inspected; according to the beam convergence point P2 on the observation screen near the optical axis of the mirror to be inspected, the lift and translation of the mirror to be inspected is adjusted through the third five-dimensional adjustment frame. It solves the problem of difficult adjustment of the optical path compensation detection optical path of the flat wavefront zero lens compensation of the concave oblate spherical optical aspheric surface, and proposes a method and device for quickly adjusting the detection optical path from the optical principle to improve the detection efficiency and ensure smooth processing of optical components.
Description
technical field [0001] The invention specifically relates to a method and device for quickly adjusting the optical path of a plane wavefront zero compensation detection on a concave oblate spherical surface. High-resolution imaging and other application requirements. Background technique [0002] The surface shape error detection methods of concave oblate spherical optical surfaces mainly include the contour surface shape test method and the interference detection method. The compensation interferometric detection method based on the zero lens has the advantages of low detection cost, easy preparation of the compensation lens, and controllable surface error, and has been widely used. [0003] According to the basic principle of zero compensation detection, the beam will return along the original optical path after being self-collimated and reflected by the mirror to be inspected. There is a real image point in the spherical wavefront compensation detection optical path of ...
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IPC IPC(8): G01B11/24G02B27/00
CPCG01B11/2441G01B21/045G02B27/00
Inventor 马赫王兴赵恩才马冬梅
Owner CHANGGUANG SATELLITE TECH CO LTD