Purification system and method for electronic-grade carbon tetrafluoride

A carbon tetrafluoride, purification method technology, applied in chemical instruments and methods, halogenated hydrocarbon disproportionation separation/purification, organic chemistry, etc. Use and other problems to achieve the effect of high product purity, less impurities, and lower maintenance rate

Active Publication Date: 2020-05-05
FUJIAN DEER TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

This technology has been improved on the basis of the previous technology, and a double vertical reactor is designed. Under the mode of the two-stage reactor, the utilization rate of fluorine gas is improved, but the purity of carbon tetrafluoride gas is still low. Shortcomings
CN 1

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  • Purification system and method for electronic-grade carbon tetrafluoride
  • Purification system and method for electronic-grade carbon tetrafluoride
  • Purification system and method for electronic-grade carbon tetrafluoride

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preparation example Construction

[0073] The preparation system of electronic grade carbon tetrafluoride provided by the present invention includes a fluorine gas source, a reaction device and a purification system. The fluorine gas source is sealed and connected to the reaction device, and the reaction device is sealed and connected to the purification system.

[0074] The fluorine gas source includes an electrolytic cell, a cryogenic dust collector 1 , a condenser 2 and a fluorine gas buffer tank 3 .

[0075] Among them, the electrolytic cell has an automatic system, and the feeding method is liquid level interlocking automatic feeding.

[0076] Wherein, the bottom end of the condenser is provided with a hydrogen fluoride discharging device.

[0077] The reaction device includes a carbon reactor 4 and a dust removal device 5, wherein the carbon reactor also includes a secondary reactor.

[0078] The purification system includes a washing system, an adsorption system and a rectification system. The washing ...

Embodiment 1

[0080] S1. Preparation of fluorine gas: the electrolytic cell automatically produces fluorine gas. After passing through the low-temperature dust collector and condenser, it reaches the fluorine buffer tank;

[0081] Among them, the temperature of the electrolytic cell is controlled at 80-95°C, the acidity is controlled at 40-42%, and the liquid level is interlocked to automatically add hydrogen fluoride and evenly feed, which greatly reduces the excessive addition of hydrogen fluoride. The gas passes through the cryogenic dust collector 1, and the temperature of the dust collector is controlled at 4°C. After the dust and electrolyte in the gas are removed, it enters the condenser 2, and the temperature of the condenser is controlled at -60°C. There is a hydrogen fluoride discharge device at the bottom, which can realize automatic Unloading, recovering hydrogen fluoride for reuse, greatly reduces the cost, and can increase the purity of fluorine gas to more than 95%. The outl...

Embodiment 2

[0101] S1. Preparation of fluorine gas: the electrolytic cell automatically produces fluorine gas. After passing through the low-temperature dust collector and condenser, it reaches the fluorine buffer tank;

[0102] Among them, the temperature of the electrolytic cell is controlled at 95-100°C, the acidity is controlled at 42%, the liquid level is interlocked to automatically add hydrogen fluoride, and the material is evenly added, which greatly reduces the excessive addition of hydrogen fluoride. The gas passes through the cryogenic dust collector 1, and the temperature of the dust collector is controlled at 3°C. After the dust and electrolyte in the gas are removed, it enters the condenser 2, and the temperature of the condenser is controlled at -80°C. There is a hydrogen fluoride discharge device at the bottom, which can realize automatic Unloading, recovering hydrogen fluoride for reuse, greatly reduces the cost, and can increase the purity of fluorine gas to more than 95...

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Abstract

The invention provides a purification system for electronic-grade carbon tetrafluoride, which comprises a washing system, an adsorption system and a rectification system. The washing system comprisesa water washing tower and alkaline washing towers. The washing system specifically comprises a pre-washing tower, a water washing tower, an alkaline washing tower, a pyrolysis tower and an alkaline washing tower. The adsorption system comprises a gas-liquid separator, a freezing water removal tank and adsorption towers, and the adsorption towers comprise a low-pressure adsorption tower and a high-pressure adsorption tower. The rectification system comprises a storage tank, a rectification tower and a high-pressure diaphragm compressor. The invention further provides a method for purifying electronic-grade carbon tetrafluoride by adopting the system. Electronic-grade carbon tetrafluoride gas with the purity of 99.9995% or above is obtained through water washing, alkali washing, pyrolysis, alkali washing, gas-liquid separation, adsorption, storage, rectification and filling.

Description

technical field [0001] The invention relates to the technical field of carbon tetrafluoride production, in particular to a purification system and method for electronic grade carbon tetrafluoride. Background technique [0002] Carbon tetrafluoride (CF 4 ) is currently the most widely used plasma etching gas in the microelectronics industry. It is widely used in the etching of thin film materials such as silicon, silicon dioxide, silicon nitride, phosphosilicate glass, and tungsten. It is used for surface cleaning of electronic devices, production of solar cells, There are also numerous applications in laser technology, cryogenic refrigeration, gas insulation, leak detection agents, attitude control of space rockets, detergents in printed circuit production, lubricants, and brake fluids. Due to its strong chemical stability, CF 4 It can also be used in metal smelting and plastic industries, etc. [0003] There are many methods for preparing carbon tetrafluoride, but basica...

Claims

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Application Information

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IPC IPC(8): C07C17/007C07C17/38C07C17/383C07C17/389C07C17/395C07C19/08
CPCC07C17/007C07C17/38C07C17/383C07C17/389C07C17/395C07C19/08
Inventor 李嘉磊刘志强王凤侠傅钟盛林百志曾熙张朝春
Owner FUJIAN DEER TECH CORP
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