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A kind of anti-adhesion radio frequency mechanical switch and preparation method thereof

A mechanical switch and anti-adhesion technology, which is applied in the direction of electric switches, electrostatic relays/electro-adhesion relays, waveguide devices, etc., can solve problems such as contact adhesion and switch failure, achieve high reliability, avoid switch failure, The effect of simple preparation method

Active Publication Date: 2021-10-15
NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The surface state of the contact, contact fatigue and high current can easily lead to the adhesion of the contact and make the switch fail

Method used

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  • A kind of anti-adhesion radio frequency mechanical switch and preparation method thereof
  • A kind of anti-adhesion radio frequency mechanical switch and preparation method thereof
  • A kind of anti-adhesion radio frequency mechanical switch and preparation method thereof

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Embodiment Construction

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative efforts fall within the protection scope of the present invention.

[0026] In this embodiment, an anti-adhesion radio frequency mechanical switch is provided, such as figure 1 As shown, it includes a substrate 1, a coplanar waveguide structure, a cantilever beam structure and a driving structure.

[0027] The coplanar waveguide structure includes input signal lines 21 , output signal lines 22 and ground lines 23 disposed on the substrate 1 . There are two ground wires 23, the input signal wire 21 and the output signal wire 22 are located betw...

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Abstract

The invention provides an anti-adhesion radio frequency mechanical switch and a preparation method thereof. The anti-adhesion radio frequency mechanical switch includes a substrate; a coplanar waveguide structure is arranged on the substrate for transmitting radio frequency and microwave signal; a cantilever beam structure, including a cantilever beam, an inductance array and a contact; one end of the cantilever beam is connected to the coplanar waveguide structure through a bracket, and the other end of the cantilever beam is provided with a contact; the inductance array is arranged on the on the cantilever beam; the driving structure includes an inductor and a pad, and the inductor is arranged on the substrate; the inductor is connected to the pad through a metal wire. The present invention realizes that the radio frequency mechanical switch actively breaks away from the adhesion state through the cantilever beam structure, and avoids the switch failure problem caused by the contact adhesion problem of the radio frequency mechanical switch with the increase of power during the use process.

Description

technical field [0001] The invention relates to the technical field of electronic devices, in particular to an anti-adhesion radio frequency mechanical switch and a preparation method thereof. Background technique [0002] There have been more than 20 years of research on radio frequency micromechanical switches in the world. From the switching mode, the radio frequency micromechanical switch can be roughly divided into two categories. (1) The general structure of the contact switch is: use static electricity or other driving methods to control the contact or disconnection of the signal line to achieve the effect of controlling the switch on and off. Its isolation depends on the parasitic capacitance of the disconnected part. The parasitic capacitance of the contact switch increases rapidly with the increase of the frequency, resulting in the rapid deterioration of the isolation of the switch; (2) The general structure of the capacitive switch is: the movement of the membra...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01P1/10H01P11/00H01H59/00H01H11/00
CPCH01H11/00H01H59/00H01P1/10H01P11/00
Inventor 姜理利王雷李杰
Owner NO 55 INST CHINA ELECTRONIC SCI & TECHNOLOGYGROUP CO LTD
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