Fluidized bed reactor

Abstract

A fluidized bed reactor (1) in which is it possible stably measure the temperature distribution inside of the fluidized bed reactor (1) without causing damage to temperature measurement units is provided. In this fluidized bed reactor (1), which generates trichlorosilane by reacting a metal silicon powder and a hydrogen chloride gas, multiple temperature measurement units (50) for measuring the temperature inside of a reactor vessel (10) are provided on the outer surface of the reactor vessel (10).

Description

technical field [0001] The invention relates to a fluidized bed reaction device, in particular to a fluidized bed reaction device which reacts metal silicon powder and hydrogen chloride gas to generate trichlorosilane. Background technique [0002] As an apparatus for producing trichlorosilane by reacting metal silicon powder with hydrogen chloride gas, a fluidized bed reaction apparatus (in this specification, simply referred to as “apparatus”) is used. In the above device, the metal silicon powder and the hydrogen chloride gas form a fluidized bed in the reaction vessel included in the device, and in the fluidized bed, the metal silicon powder and the hydrogen chloride gas react to generate trichlorosilane. [0003] Specifically, in the production reaction of trichlorosilane, the metal silicon powder is flowed by supplying hydrogen chloride gas from the lower part of the reaction vessel to form a fluidized bed. At this time, there may be a region where a generation reacti...

AI Technical Summary

Problems solved by technology

At this time, there may be a region where a generation reaction occurs violently due to insufficient cooling by a cooler for cooling the fluidized bed, or an insufficient supply of hydrogen chloride gas due to clogging of the gas supply port by metallic silicon powder may result in no region where the formation reaction occurs sufficiently, etc.

When the operation is continued without the generation of these regions, the generation of trichlorosilane becomes unstable, and there is a possibility of damage to the device or a serious accident depending on the situation.

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