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MEMS microphone and manufacturing method thereof

A microphone and diaphragm technology, which is applied to semiconductor electrostatic transducers, electrostatic sensors, electrostatic transducer microphones, etc., can solve the problems of microphone performance deterioration and impact on microphone yield, so as to avoid reliability decline and improve overall performance Effect

Pending Publication Date: 2020-05-29
HANGZHOU SILAN MICROELECTRONICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The structural defects introduced by the process deviation not only affect the yield of the microphone, but also lead to a sharp deterioration of the performance of the MEMS microphone in the application environment

Method used

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  • MEMS microphone and manufacturing method thereof
  • MEMS microphone and manufacturing method thereof
  • MEMS microphone and manufacturing method thereof

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Embodiment Construction

[0062] Various embodiments of the invention will be described in more detail below with reference to the accompanying drawings. In the various drawings, the same elements are denoted by the same or similar reference numerals. For the sake of clarity, various parts in the drawings have not been drawn to scale.

[0063] The invention can be embodied in various forms, some examples of which are described below.

[0064] figure 1 A schematic flow chart showing a manufacturing method of a MEMS microphone according to an embodiment of the present invention, Figures 2 to 1 4 shows cross-sectional views of different stages of the manufacturing method of the MEMS microphone according to the embodiment of the present invention.

[0065] In step S01, a first isolation layer 102 is formed on the substrate 101, such as figure 2 shown.

[0066] In this embodiment, the substrate 101 is, for example, a substrate silicon wafer with a crystal orientation. Optionally, the doping of the ...

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Abstract

The invention discloses an MEMS microphone and a manufacturing method thereof. The MEMS microphone comprises: a substrate, a diaphragm and a back polar plate electrode which are located on a first surface of the substrate, wherein the diaphragm and the back polar plate electrode are separated from each other and the first surface of the diaphragm and the first surface of the back polar plate electrode are opposite to each other, and a vocal cavity which penetrates through the substrate to reach the second surface of the diaphragm, wherein the second surface of the diaphragm is in point contactwith the first surface of the substrate through a connecting part. According to the invention, the diaphragm is in point contact with the substrate, so that the stress of the diaphragm is greatly released, and the sensitivity of mechanical response of the diaphragm is improved.

Description

technical field [0001] The invention belongs to the technical field of micro-microphones, and more specifically relates to MEMS microphones and a manufacturing method thereof. Background technique [0002] The MEMS microphone is a MEMS (Micro-Electro-Mechanical System, Micro-Electro-Mechanical System) device manufactured by a micro-machining process. Due to the advantages of small size, high sensitivity, and good compatibility with existing semiconductor technologies, MEMS microphones are more and more widely used in mobile terminals such as mobile phones. The structure of the MEMS microphone includes a diaphragm and a back plate electrode facing each other, which are respectively connected to corresponding electrodes via lead wires. A cavity is formed between the diaphragm and the back plate electrode to provide the required vibration space for the diaphragm. [0003] With the development of micromachining technology, the distance between the diaphragm and the back plate ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H04R19/00H04R19/04H04R31/00
CPCH04R19/005H04R19/04H04R31/00H04R2231/00
Inventor 周延青潘华兵郑泉智胡铁刚
Owner HANGZHOU SILAN MICROELECTRONICS