Diamond-like protective coating and preparation method thereof

A technology of protective coating and diamond layer, applied in metal material coating process, coating, gaseous chemical plating, etc., can solve the problems of slow deposition rate, small depth of DLC coating, poor quality, etc., and achieve simple process , good coating quality and high production efficiency

Inactive Publication Date: 2020-06-02
SHANGHAI NEWARC COATING TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The hardness and elastic modulus of the DLC film are relatively high, but due to the different deposition methods, the mechanical properties of the DLC coating prepared are very different; the DLC coating is also applied to the workpiece for its excellent wear resistance and low friction coefficient. In terms of surface wear resistance, the friction characteristics of DLC coatings vary greatly due to different deposition techniques
[0004] At present, magnetron sputtering deposition technology is mainly used to prepare DLC coating. This method has the advantages of dense DLC film and high surface finish. At present, it is mainly used on decorative workpieces and some tools and molds. The layer bonding force is not high, the deposition rate is slow, it is difficult to meet the surface strengthening requirements of the workpiece under severe service conditions, and it is difficult to apply to deep hole parts, and there are defects of small DLC coating depth and poor quality

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  • Diamond-like protective coating and preparation method thereof
  • Diamond-like protective coating and preparation method thereof
  • Diamond-like protective coating and preparation method thereof

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preparation example Construction

[0023] The invention provides a preparation method of a diamond-like protective coating, comprising the following steps:

[0024] A hollow cathode discharge plasma chemical vapor deposition technique is used to sequentially deposit a silicon-doped diamond-like bottom layer and a diamond-like layer on the surface of a substrate.

[0025] The invention adopts the hollow cathode discharge plasma chemical vapor deposition technology to deposit the silicon-doped diamond-like bottom layer on the substrate surface. In the present invention, the material of the substrate is preferably metal, specifically tool steel, stainless steel or hard alloy. In the present invention, the substrate is preferably a deep-hole part, a tool or a mold, and the preparation method provided by the present invention is especially suitable for deep-hole parts. In a specific embodiment of the present invention, the deep hole parts are preferably pipes with a hole diameter of 8-300mm and a diameter / length ra...

Embodiment 1

[0046] Polish the stainless steel deep-porous substrate with an aspect ratio of 10:1, and then clean the polished substrate with ultrasonic waves in absolute ethanol and acetone for 10 minutes, and the frequency of the ultrasonic wave is 30 kHz to obtain a substrate with a clean surface;

[0047] The surface-cleaned substrate is placed in PECVD equipment, the bias voltage of the hollow cathode bottom layer is -100V, the control voltage is 1200V; the pulse frequency is 20kHz; the C 2 h 2 The flow rate of silane is 200mL / min; the flow rate of silane is 15mL / min, and the processing time is 10min, and a silicon-doped diamond-like carbon bottom layer with a thickness of 0.5μm is obtained on the surface of the substrate;

[0048] Adjusting the parameters of the hollow cathode discharge plasma chemical vapor deposition technology, the reaction gas Ar / C 2 h 2 The flow ratio is 1:2, the temperature of the substrate is 100°C, the air pressure is 1.0Pa, the pulse bias voltage is 3000V,...

Embodiment 2

[0051] Polish the high-speed steel deep-hole substrate with an aspect ratio of 15:1, and then clean the polished substrate with ultrasonic waves in absolute ethanol and acetone for 10 minutes, and the frequency of the ultrasonic wave is 30 kHz to obtain a clean substrate;

[0052] The substrate with the clean surface is placed in PECVD equipment, the bias voltage of the hollow cathode bottom layer is -100V, the control voltage is 1000V; the pulse frequency is 20kHz; the C 2 h 2 The flow rate of silane is 200mL / min; the flow rate of silane is 15mL / min, and the processing time is 10min, and a silicon-doped diamond-like carbon bottom layer with a thickness of 0.5μm is obtained on the surface of the substrate;

[0053] Adjusting the parameters of the hollow cathode discharge plasma chemical vapor deposition technology, the reaction gas Ar / C 2 h 2 The flow ratio is 1:2, the temperature of the substrate is 200°C, the air pressure is 2.0Pa, the pulse bias voltage is 3000V, the puls...

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Abstract

The invention belongs to the technical field of material surface modification and particularly relates to a diamond-like protective coating and a preparation method thereof. The preparation method ofthe diamond-like protective coating provided by the invention comprises the following steps of depositing a silicon doping diamond-like base layer and a diamond-like layer on the surface of a base body in sequence through the hollow cathode discharge plasma chemical vapor deposition technology. According to the preparation method, the silicon doping diamond-like base layer is deposited on the surface of the base body through the hollow cathode discharge plasma chemical vapor deposition technology; through the hollow cathode effect, silicon elements are nested into the base body, and the bonding strength of the diamond-like layer and the base body can be remarkably improved; and finally, the diamond-like layer is deposited on the surface of the silicon doping diamond-like base layer throughthe hollow cathode discharge plasma chemical vapor deposition technology to obtain the smooth and compact diamond-like protective coating with high hardness and good friction performance.

Description

technical field [0001] The invention belongs to the technical field of material surface modification, and in particular relates to a diamond-like protective coating and a preparation method thereof. Background technique [0002] After decades of development, the protective coating deposition technology on the surface of materials has made great progress, and has been widely used in production, achieving huge economic benefits. However, coating deposition on bored parts has been a challenge in this field. In production practice, there are many types of workpieces with the inner surface as the working surface, such as inner hole molds, transportation pipes, shaft sleeves, etc. These workpieces are often damaged due to inner wall wear and corrosion. In order to improve its working efficiency and life, it is still a very necessary technical means to deposit a corrosion-resistant, wear-resistant, high-temperature-resistant protective coating on its inner wall. However, the tech...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C16/26C23C16/515
CPCC23C16/26C23C16/515
Inventor 冯利民李伟
Owner SHANGHAI NEWARC COATING TECH CO LTD
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