Surface and subsurface integrated confocal microscopic measurement device and method

Abstract

The invention discloses a surface and subsurface integrated confocal microscopic measurement device and a surface and subsurface integrated confocal microscopic measurement method. The surface and subsurface integrated confocal microscopic measurement comprises an annular light illumination module, an annular light scanning module, a reflective confocal detection module and a dark field confocal detection module, wherein the annular light illumination module comprises a laser, a beam expander, a polarizing film I, a polarizing beam splitting film, a quarter-wave plate, a conical lens and a plane mirror; the annular light scanning module comprises a transflective film I, a two-dimensional scanning galvanometer, a scanning lens, a tube lens, an objective lens and a to-be-detected sample; thereflective confocal detection module comprises a transflective film II, a polarizing film II, a focusing lens I, a pinhole I and a camera I; and the dark field confocal detection module comprises a diaphragm, a polarizing film III, a focusing lens II, a pinhole II and a camera II. By means of illumination beam shaping and complementary aperture shielding detection, the surface and subsurface integrated confocal microscopic measurement device effectively separates a sample surface reflection signal and a subsurface scattering signal, can obtain three-dimensional distribution information of defects such as nanoscale surface scratches, abrasion, subsurface cracks and bubbles at the same time, and has a surface and subsurface defect integrated detection function.

Description

technical field [0001] The invention relates to the technical field of optical precision measurement, and more specifically relates to a surface and subsurface integrated confocal microscopic measurement device and method. Background technique [0002] High-performance optical components and micro-electromechanical components are the core components of modern high-end equipment. In order to ensure their processing quality and service reliability, it is necessary to perform surface topography measurement and sub-surface defect detection on them. [0003] The existing non-destructive measurement technology of surface topography at home and abroad mainly includes: confocal microscopic measurement technology, white light interference microscopic measurement technology and zoom microscopic measurement technology. Compared with the other two techniques, the confocal microscopic measurement technology has the characteristics of wide applicability of measuring samples and the abilit...

AI Technical Summary

Problems solved by technology

Its ubiquitous shortcomings are low depth positioning accuracy, low signal-to-noise ratio, low detection efficiency, and limited detection samples.

And at present

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