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Method for making optical thin film, film structure, coating method, laser mirror

A film structure, optical thin film technology, applied in the field of laser mirrors and optical thin film production, can solve the problems of index level and pass rate decline, and achieve the effect of high pass rate preparation

Active Publication Date: 2022-04-26
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

In the production process, the main process parameters have mutual influence on the above-mentioned indicators, and it is difficult to achieve simultaneous compliance of multiple indicators through a single process factor
[0004] Therefore, the comprehensive index requirement is a great challenge to the coating process, and it is easy to cause a significant drop in the index level and pass rate

Method used

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  • Method for making optical thin film, film structure, coating method, laser mirror
  • Method for making optical thin film, film structure, coating method, laser mirror
  • Method for making optical thin film, film structure, coating method, laser mirror

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Embodiment Construction

[0044] In the present application, all the embodiments, implementations and features of the present application can be combined with each other under the condition of no contradiction or conflict. In this application, conventional equipment, devices, components, etc., can be purchased commercially, or can be self-made according to the content disclosed in this application. In this application, in order to highlight the key points of this application, some conventional operations, equipment, devices, and components are omitted or simply described.

[0045] Laser Mirrors (LM for short) are high-quality / high-quality mirrors used in laser resonators and other optical devices.

[0046] Usually LM is expected to have the following basic characteristics (mainly referring to the reflective film / coating / coating of the laser mirror):

[0047] 1. Low reflection loss (especially for highly reflective mirrors), or specified transmittance in a given wavelength range (for output couplers). ...

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Abstract

A method for making an optical thin film, a film system structure, a coating method, and a laser mirror belong to the field of optical equipment. The method includes: fabricating a first membrane stack that satisfies the spectral index on a substrate; fabricating a second membrane stack that satisfies the surface shape index on the first membrane stack; Damage index of the third membrane stack. The optical thin film obtained by the above-mentioned method can realize the high-quality production of the laser reflective film with high comprehensive index.

Description

technical field [0001] The present application relates to the field of optical equipment, in particular, to a method for making an optical thin film, a film structure, a coating method, and a laser mirror. Background technique [0002] With the continuous advancement of laser technology, various laser devices have higher and higher requirements for laser reflectors. Compared with ordinary optical mirrors, laser mirrors usually have higher quality requirements. [0003] For laser mirrors, there is a comprehensive index requirement, which usually includes: surface shape index, damage threshold index and spectral index. In the production process, the main process parameters have mutual influence on the above-mentioned indicators, and it is difficult to achieve the simultaneous compliance of multiple indicators through a single process factor. [0004] Therefore, the comprehensive index requirement is a great challenge to the coating process, which will easily lead to a signif...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/10C23C14/08C23C14/46C23C14/54G02B1/10G02B5/08
CPCC23C14/10C23C14/083C23C14/46C23C14/54G02B1/10G02B5/0816
Inventor 卫耀伟王震张飞李树刚唐明吴倩潘峰罗晋罗振飞刘民才张清华王健许乔
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS