Integrated multifunctional exhaust device for making photomultiplier tubes and method of use
A technology of photomultiplier tubes and exhaust devices, which is applied in the fields of detailed information of electron multipliers, machines with sequentially arranged working positions, and climate sustainability. Cleanliness and other issues to achieve the effect of reducing personnel costs, excellent optical performance, and improving work efficiency
Active Publication Date: 2022-07-08
NORTH NIGHT VISION TECH
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Problems solved by technology
When making photomultiplier tubes with traditional technology, baking and degassing, optical coating and cathode production are all performed on different equipment. During the circulation of each process, the glass spherical shell will be exposed to the atmosphere and re-adsorb the gas. The cleanliness of the glass substrate during the cathode production makes the impurity gas on the surface of the substrate affect the growth of the film layer, thereby affecting its optical performance
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[0017] In order to better understand the technical content of the present invention, specific embodiments are given and described below in conjunction with the accompanying drawings.
[0018] Aspects of the invention are described in this disclosure with reference to the accompanying drawings, in which a number of illustrative embodiments are shown. Embodiments of the present disclosure are not necessarily intended to include all aspects of the invention. It should be understood that the various concepts and embodiments described above, as well as those described in greater detail below, can be implemented in any of a number of ways, as the concepts and embodiments disclosed herein do not limited to any implementation. Additionally, some aspects of the present disclosure may be used alone or in any suitable combination with other aspects of the present disclosure.
[0019] figure 1 The shown multifunctional exhaust device for making photomultiplier tubes includes a bell 1, ...
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The invention relates to the technical field of photomultiplier tubes, and provides an integrated multifunctional exhaust device for making photomultiplier tubes and a method of using the same, including a bell jar, a bottom plate, a rack, an electronic cleaning system, a cathode system, a glow discharge systems, coating systems, optical fibers for reflectance monitoring, air release valves, molecular pumps, dry pumps and electronic control systems. The integrated multifunctional exhaust device of the present invention can make the photomultiplier tube from baking and degassing to the final sealing completed on one piece of equipment in a high vacuum environment, including optical coating, glow oxidation, cathode production All parts and substrates are exposed to the atmosphere during the process, reducing the pollution in the production process and ensuring the optimal optical performance of the photomultiplier tube.
Description
technical field [0001] The invention relates to the field of photomultiplier tubes, in particular to an integrated system for baking and exhausting, optical coating, glow oxidation, photocathode production, tube core electronic cleaning and sealing in the photomultiplier tube manufacturing process device. Background technique [0002] The photomultiplier tube is a vacuum tube, so the cleanliness of components and substrates is very high. In the production of photomultiplier tubes by traditional technology, baking and degassing, optical coating and cathode production are all performed on different equipment. During the flow of each process, the glass spherical shell will be exposed to the atmosphere and re-absorb the gas, which is difficult to guarantee the optical coating and the production. The cleanliness of the glass substrate during cathode fabrication makes the impurity gas on the surface of the substrate affect the growth of the film layer, thereby affecting its optic...
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IPC IPC(8): H01J9/48H01J43/04
CPCH01J9/48H01J43/04Y02P70/50
Inventor 孙建宁侯巍司曙光苏德坦金睦淳王兴超王丛杰王亮顾莹周帆
Owner NORTH NIGHT VISION TECH