Preparation and characterization method of precious metal ultrafine wire EBSD test sample

Abstract

The invention relates to a preparation and characterization method for a precious metal ultrafine wire EBSD test sample. The comprises the steps: stretching a precious metal ultrafine wire sample andbonding the precious metal ultrafine wire sample to the top end of the inclined surface of a double-inclined sample table; placing the precious metal ultrafine wire sample in a sample bin to select asample section preparation and test area; tilting the sample table, carrying out carbon plating treatment, ion beam cutting and ion beam surface polishing treatment on the sample in the field of viewto obtain a cross section observation sample of the noble metal ultrafine wire without surface stress, and observing and obtaining a microstructure morphology image of a wire cross section observationarea through ion beam channel contrast imaging; tilting the double-tilting sample table until the angle between the observation section and the incident electron beam is 70 degrees, and performing electron back scattering diffraction detection on the section of the ultrafine wire through a CCD detector to obtain an EBSD image and a crystallography signal of the section of the sample micro-area. The EBSD and the ion beam channel contrast image are combined to provide more systematic and comprehensive data support for microcell analysis of precious metal ultrafine wires, and the comprehensive analysis range of samples can be expanded.

Description

technical field [0001] The invention relates to a preparation and characterization method of a precious metal superfine wire EBSD test sample, belonging to the technical field of precious metal superfine wire testing. Background technique [0002] Precious metal ultra-fine wires are often used in the key positions of precision electronic functional devices, but due to the fine size of the finished products (diameter <φ0.1mm), traditional techniques cannot characterize the microstructure of ultra-fine wires, and alloy sheet structures are usually used to indirectly Infer the microstructure evolution law of materials. However, there are large structural differences between the wire and the sheet during the deformation process, and this characterization method cannot accurately and objectively reflect the real tissue structure. The lack of accuracy has hindered the research work on recrystallization structure analysis of noble metal ultra-fine wire, phase identification and...

AI Technical Summary

Problems solved by technology

[0004] Aiming at the problems existing in the prior art, the present invention provides a preparation and characterization method of precious metal ultra-fine wire EBSD test samples. Before the EBSD surface scanning and collection of the Kikuchi line, the present invention uses channel contrast imaging to observe the grain size and find defects. Dislocation structures, twin boundaries, and deformation bands are characterized, and then EBSD technology is used to calibrate the crystal orientation of the area of ​​interest; the combination of EBSD and channel contrast images improves the spatial resolution of EBSD Therefore, the present invention can solve the problems that traditional technical methods cannot accurately characterize the recrystallization structure of precious metal ultra-fine wire, phase identification and thickness measurement of ultra-fine composite wire, preferred orientation of twins, grain boundary distribution, etc.

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