A scanning nozzle cleaning tank and cleaning method

Abstract

The invention discloses a scanning nozzle cleaning tank and a cleaning method. The scanning nozzle cleaning tank includes: a tank body and an upper cover plate, the tank body and the upper cover plate are sealed by a corrosion-resistant sealing ring, the tank body is provided with at least four reagent storage tanks, and the upper cover plate is correspondingly The same number of nozzle inlets and outlets are provided, each of the reagent storage tanks is equipped with a liquid inlet, an overflow port and a liquid level sensor, and a liquid discharge port is provided at the bottom, and the liquid level sensor is used to detect the liquid level of the reagent in the reagent tank. Whether the bit is empty or full. The tank body layout of the present invention is more reasonable, the structure is more compact, and the use cost is also lower. At the same time, the occurrence of pollution can be effectively reduced, and a set of reasonable use methods can be provided to increase production capacity.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a scanning nozzle cleaning tank and a cleaning method. Background technique [0002] Driven by Moore's Law, the 14nm generation of high-performance, low-power devices dominated by FinFETs (Fin Field Effect Transistors) has already entered our lives, but few people know that a large number of new chemicals need to be introduced to manufacture such powerful devices. Elements, fewer people know that because the introduction of "new" elements has made it extremely difficult to monitor the pollution of chip processing plants. Because each element has different effects on silicon-based devices, some must be added to achieve functions, and some are unintentionally introduced to reduce or kill the pollution source of the device, so all possible elements must be strictly monitored. In the periodic table of elements, metal elements account for the majority, and their active chemica...

AI Technical Summary

Problems solved by technology

However, fluorine-containing plastics are hydrophobic. If they encounter a liquid with a slightly higher surface tension, such as a water-based solution, it will not be able to complete normal overflow or fast drainage in a small tank.

In addition, generally fluorine-containing plastics are non-transparent, and it is difficult to detect the liquid level of the tank

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