A probe structure for measuring the surface topography of inner holes by refractive type color confocal

Abstract

The invention discloses a refraction type color confocal probe structure for measuring the surface topography of an inner hole, and relates to the technical field of optical surface detection. It includes a right-angle prism, a dispersive lens and a hollow rotating mechanism, the right-angle prism is arranged in the inner hole, one end of the dispersive lens is fastened with the right-angle prism by screws, and the other end of the dispersive lens is embedded in the hollow rotating The dispersive lens is composed of a barrel, a collimating lens, a dispersive lens and a focusing lens. The refraction type color confocal probe structure for measuring the surface topography of the inner hole achieves the advantage of high efficiency by setting a micro hollow rotary reducer and a micro DC motor. The dispersive lens on the device, and then drives the right angle prism to rotate to scan the inner wall surface of the inner hole, so as to measure the surface topography of the inner hole, which has a high-efficiency measurement effect.

Description

technical field [0001] The invention relates to the technical field of optical surface detection, in particular to a probe structure for measuring the surface topography of an inner hole with a refractive type color confocal. Background technique [0002] In industrial production, various measurement equipment is always inseparable, and it is an indispensable link for the parameter measurement of parts. In the traditional measurement technology, contact measurement methods such as three-coordinate measurement and inspection tool measurement are mainly used. Optical measurement equipment is favored by many companies because of its advantages of short measurement time, non-contact measurement without wear on the workpiece, and multiple dimensions can be obtained in one measurement. The measurement equipment used daily includes projectors, video cameras, automatic optical measurement systems, etc., but the optical measurement equipment currently used still has the following sho...

AI Technical Summary

Problems solved by technology

[0003] 1. The measurement process is relatively complicated, and there are great limitations in use, the measurement accuracy is limited, and it is impossible to know the surface of the workpiece defect;

[0004] 2. Limited by the actual size and shape of the inspection tool and the actual size and shape of the parts, some positions on the parts cannot be measured or are difficult to measure, which affects the measurement range and measurement accuracy;

[0005] 3. The technology used to measure the distribution of the light output intensity of the workpiece relative to the light output angle is to use a photodetector to scan each light output angle, and only measure the forward light of the workpiece, so it is impossible to check whether the light output angle range of the light emitting element is normal

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