Full-angle measurement and control circuit system of micro-electro-mechanical multi-ring gyroscope

Abstract

The invention discloses a full-angle measurement and control circuit system of a micro-electro-mechanical multi-ring gyroscope. The full-angle measurement and control circuit system comprises a gyroscope pre-amplification circuit, an ADC module, a demodulation module, a parameter calculation module, a PI controller module, a coordinate conversion module, a modulation module, a DAC module and a tuning module. The pre-amplification circuit module is connected with a drive electrode and a detection electrode of the micro-electro-mechanical multi-ring gyroscope; the ADC module is connected with the pre-amplification circuit; the demodulation module is connected with the ADC module; the parameter calculator module is connected with the tuning module; the PI controller module is connected with the parameter calculation module; the coordinate conversion module is connected with the PI controller module; the modulation module is connected with the coordinate conversion module; the DAC module is connected with the modulation module; the pre-amplification circuit is connected with the DAC module; the digital control oscillator module is connected with the PI controller; the tuning module isconnected with the tuning electrode; according to the invention, full-angle detection and control of the micro-electro-mechanical multi-ring gyroscope can be realized.

Description

technical field [0001] The invention belongs to the field of microelectromechanical systems, in particular to a full-angle measurement and control circuit system of microelectromechanical multi-ring gyroscopes. Background technique [0002] As a kind of solid wave gyroscope, micro-electromechanical (MEMS) multi-ring gyroscope uses single crystal silicon as the main processing material. Because it is processed by mature MEMS technology, it has most of the advantages of MEMS gyroscope; at the same time, it is a kind of solid wave gyroscope , compared with mass block MEMS gyroscope, it has the advantages of small energy dissipation, high mechanical sensitivity, concentrated mass, low mechanical noise and so on. Because of the above-mentioned advantages, microelectromechanical (MEMS) multi-ring gyroscopes occupy an important position in the field of MEMS gyroscopes. [0003] In practical applications, most micro-electromechanical (MEMS) multi-loop gyro control systems use force...

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Problems solved by technology

However, the full-angle output measurement and control circuit has problems such as complex circuit structure and many lin

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