Alignment module, alignment device, film deposition production line and control method

Abstract

The invention discloses an alignment module, an alignment device, a film deposition production line and a control method. The alignment module comprises a mask frame, a pressing plate assembly and a magnetic attraction assembly. The mask frame is configured to be a bearing mask plate. The mask frame is positioned to an external device through a positioning structure and is detachably connected with the external device. The pressing plate assembly is movably arranged on one side of the mask frame, and the pressing plate assembly can be used for pressing a substrate and the mask plate which arealigned. The magnetic attraction assembly comprises first magnetic attraction parts which are arranged on the mask frame and second magnetic attraction parts arranged on the pressing plate assembly. The pressing plate assembly is used for pressing the substrate and the mask plate which are aligned, then the first magnetic attraction parts are pressed on the pressing plate assembly, the first magnetic attraction parts and the second magnetic attraction parts are mutually attracted, and therefore the pressed substrate and the mask plate can be attached to each other. By means of the alignment module, the alignment device, the film deposition production line and the control method, the alignment module can be used for carrying the aligned substrate and mask plate to be independently moved andtransferred, in the transferring process, the alignment module can ensure the position precision of the aligned substrate and mask plate.

Description

technical field [0001] The invention relates to the technical field of OLED vacuum evaporation equipment, in particular to an alignment module, alignment equipment, a film deposition production line and a control method. Background technique [0002] Organic thin-film electroluminescence display device (OLED) is a new technology in which organic semiconductor materials emit light under the action of an electric field, and has developed rapidly in recent years. The advantages of OLED lighting products such as low energy consumption, environmental protection, ultra-thin, high color saturation, and surface light source make it one of the mainstream trends in the development of lighting products in the future. [0003] Before the evaporation material selected by the panel manufacturer is officially put into production, it is necessary to verify the performance of the selected evaporation material and the rationality of the process. For this reason, it is necessary to build smal...

AI Technical Summary

Problems solved by technology

[0004] Because each set of evaporation equipment needs to be equipped with a set of alignment mechanism, the accuracy of the alignment mechanism is high, so the cost is also high, which leads to high cost of evaporation equipment or a large production line

At the same time, due to the setting of multiple alignment mechanisms, the structure of the entire production line is complicated and the cost is high

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