A corrosion-resistant high-entropy alloy thin film, its preparation method and its application in seawater environment

A high-entropy alloy and corrosion-resistant technology, applied in metal material coating process, vacuum evaporation coating, coating and other directions, can solve the problem that the high-entropy alloy target is difficult to control the element content, and it is difficult to obtain a high-entropy coating with uniform composition. Complex process and other problems, to achieve the effect of high hardness, excellent performance, and obvious changes in structure

Active Publication Date: 2022-05-27
JIANGSU JINSHENGYUAN SPECIAL VALVE +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the high-entropy alloy target is difficult to control the element content, the manufacturing process is complicated and the cost is high; and it is difficult to obtain a high-entropy coating with uniform composition using a single element independent target

Method used

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  • A corrosion-resistant high-entropy alloy thin film, its preparation method and its application in seawater environment
  • A corrosion-resistant high-entropy alloy thin film, its preparation method and its application in seawater environment
  • A corrosion-resistant high-entropy alloy thin film, its preparation method and its application in seawater environment

Examples

Experimental program
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Effect test

Embodiment 1

[0032] In this embodiment, the base material is 304 stainless steel, and the surface of the base is a VAlTiCrCu high-entropy alloy film with a single-phase body-centered cubic structure.

[0033]The preparation method of the VAlTiCrCu high-entropy alloy thin film is as follows:

[0034] Using magnetron sputtering technology, a VAlTiCrCu high-entropy alloy thin film is prepared on the surface of the substrate, which specifically includes the following steps:

[0035] (1) If figure 1 shown, select a raw material purity ≥99.9% equiatomic ratio of V 50 Al 50 Target, Ti of equal atomic ratio 50 Cr 50 Target and Cu target, in the vertical direction according to V 50 Al 50 -Ti 50 Cr 50 -The order of Cu is stacked and arranged from top to bottom with thicknesses of 20mm, 20mm, and 10mm, respectively, which is one target cycle; then, 12 target cycles are included in the vertical direction to form a spliced ​​composite target.

[0036] (2) The surface of the substrate is subjec...

Embodiment 2

[0047] In this embodiment, the base material is 304 stainless steel, and the base surface is a VAlTiCrCu high-entropy alloy thin film.

[0048] The preparation method of the VAlTiCrCu high-entropy alloy thin film is as follows:

[0049] Using magnetron sputtering technology, a VAlTiCrCu high-entropy alloy thin film is prepared on the surface of the substrate, which specifically includes the following steps:

[0050] (1) If figure 1 shown, select a raw material purity ≥99.9% equiatomic ratio of V 50 Al 50 Target, Ti of equal atomic ratio 50 Cr 50 Target and Cu target, in the vertical direction according to V 50 Al 50 -Ti 50 Cr 50 -The order of Cu is stacked and arranged from top to bottom with thicknesses of 20mm, 20mm, and 10mm, respectively, which is one target cycle; then, 12 target cycles are included in the vertical direction to form a spliced ​​composite target.

[0051] (2) The surface of the substrate is subjected to mechanical grinding and polishing, and then ...

Embodiment 3

[0062] In this embodiment, the base material is 304 stainless steel, and the base surface is a VAlTiCrCu high-entropy alloy thin film.

[0063] The preparation method of the VAlTiCrCu high-entropy alloy thin film is as follows:

[0064] Using magnetron sputtering technology, the VAlTiCrCu high-entropy alloy thin film is prepared on the surface of the substrate, which mainly includes the following steps:

[0065] (1) If figure 1 shown, select a raw material purity ≥99.9% equiatomic ratio of V 50 Al 50 Target, Ti of equal atomic ratio 50 Cr 50 Target and Cu target, in the vertical direction according to V 50 Al 50 -Ti 50 Cr 50 -The order of Cu is stacked and arranged from top to bottom with thicknesses of 20mm, 20mm, and 10mm, respectively, which is one target cycle; then, 12 target cycles are included in the vertical direction to form a spliced ​​composite target.

[0066] (2) The surface of the substrate is subjected to mechanical grinding and polishing, and then ultr...

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Abstract

The invention discloses a corrosion-resistant high-entropy alloy thin film, a preparation method and its application in seawater environment. The preparation method of the corrosion-resistant high-entropy alloy thin film includes: using the VAlTiCrCu high-entropy alloy thin film, and the vacuum degree is lower than 1.0×10 –3 In a protective atmosphere of Pa, the VAlTiCrCu high-entropy alloy thin film is annealed, the annealing temperature used in the annealing treatment is 700-1100°C, the annealing time is 1-3h, and then cooled to room temperature to obtain a corrosion-resistant high-entropy alloy alloy film. The present invention uses different temperatures to anneal the VAlTiCrCu high-entropy alloy thin film, so that new FCC phases are precipitated in the single-phase BCC structure of the VAlTiCrCu high-entropy alloy thin film, the structure changes significantly, the hardness is increased by 20% to 30%, and the elastic modulus is increased. The self-corrosion current density is further reduced by 20% to 30%, and it can be used for substrate protection in seawater environments.

Description

technical field [0001] The invention relates to the technical field of alloy films and their preparation, in particular to a corrosion-resistant high-entropy alloy film, a preparation method and its application in seawater environment. Background technique [0002] The traditional alloy system based on one or two elements and compounds has become mature and saturated after long-term research, and the performance of traditional metal materials can no longer meet people's needs in production and life. In this context, a new type of alloy thin film material, high-entropy alloy thin film, has received extensive attention and research in recent years due to its excellent comprehensive properties. The high-entropy alloy film is an alloy film composed of five or more elements, and the content of each element is between 5% and 35%. This design breaks through the design concept of traditional alloys and often has multiple elements. Desirable properties such as excellent abrasion res...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/35C23C14/58C23C14/16C22C30/02
CPCC23C14/352C23C14/5806C23C14/165C22C30/02
Inventor 蒲吉斌毛春龙王文哲陈善俊王立平毛金根卢光明
Owner JIANGSU JINSHENGYUAN SPECIAL VALVE
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