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Imprinting template and imprinting method

An imprinting template and imprinting glue technology, which is applied in optics, opto-mechanical equipment, instruments, etc., can solve the problems of high production cost of imprinting template, high time and cost cost, long production cycle, etc., and achieve the effect of broadening the application.

Pending Publication Date: 2020-07-24
BOE TECH GRP CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The existing imprint template needs to be designed and manufactured according to the specific requirements of the periodic line width of the grating to be produced. The production cost of the imprint template is relatively high, and the production cycle is very long. The preparation cost of the imprint template is a limitation to the application of nanoimprint technology a major factor of
[0004] In the prior art, the period and line width of the grating made by the imprint template are fixed. If the period and line width of the grating are to be changed, the imprint template needs to be prepared again, and the time and cost are too high.

Method used

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  • Imprinting template and imprinting method

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Embodiment Construction

[0028] In order to make the technical problems, technical solutions and advantages to be solved by the embodiments of the present invention clearer, the following will describe in detail with reference to the drawings and specific embodiments.

[0029] figure 1 (a)- figure 1 (h) Schematic diagram of making gratings for prior art, such as figure 1 (a)- figure 1 As shown in (h), wherein, 1 is the substrate of the grating, and 2 is the embossing glue. The period of the existing imprinting template is fixed, and the line width is fixed. One embossing template can only produce a grating with one period and line width, if To change the period and line width of the grating, it is necessary to prepare the imprint template again, and the time and cost are too high.

[0030] Embodiments of the present invention provide an embossing template and an embossing method, capable of producing gratings with adjustable line width and period.

[0031] An embodiment of the present invention pr...

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Abstract

The invention provides an imprinting template and an imprinting method, and belongs to the technical field of imprinting. The imprinting template comprises a base plate and a plurality of parallel microstructures arranged on the base plate, wherein the areas of the cross sections of the microstructures are in negative correlation with the distance between the cross sections and the base plate in the direction away from the base plate. According to the technical scheme, the grating with adjustable line width and period can be manufactured.

Description

technical field [0001] The invention relates to the technical field of embossing, in particular to an embossing template and an embossing method. Background technique [0002] Nanoimprint technology has the advantages of high resolution, simple process, ultra-low cost, and high productivity, and is widely used in micro-nano manufacturing fields such as LEDs (light-emitting diodes) and semiconductors. [0003] The existing imprint template needs to be designed and manufactured according to the specific requirements of the periodic line width of the grating to be produced. The production cost of the imprint template is relatively high, and the production cycle is very long. The preparation cost of the imprint template is a limitation to the application of nanoimprint technology a major factor. [0004] In the prior art, the period and line width of the grating produced by the imprint template are fixed. If the period and line width of the grating are to be changed, the imprin...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/00G02B5/18
CPCG03F7/0002G03F7/0005G02B5/1857
Inventor 周雪原
Owner BOE TECH GRP CO LTD