Laser beam divergence angle measuring method combining trepanning method with cross line scanning

A laser beam and measurement method technology, applied in the field of photoelectric test and measurement, can solve unrealistic problems and achieve the effects of improved efficiency, high-precision measurement, and high centering accuracy

Inactive Publication Date: 2020-07-28
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology

This requires the centering accuracy of the small hole center and the beam center to be as high as an order of magnitude, such as 0.05mm; due to the jitter of the beam, the unevenness of the spot, and the noise of the background and environment, it is difficult to achieve such a high centering accuracy. realistic

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  • Laser beam divergence angle measuring method combining trepanning method with cross line scanning
  • Laser beam divergence angle measuring method combining trepanning method with cross line scanning
  • Laser beam divergence angle measuring method combining trepanning method with cross line scanning

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Embodiment Construction

[0024] The present invention will be described in detail below with reference to the drawings and embodiments.

[0025] The present invention provides a method for measuring the divergence angle of a laser beam with a sleeve hole method combined with cross-line scanning. The process is as follows figure 1 Shown.

[0026] S1. The laser emits a laser beam. In the output optical path of the laser, an off-axis parabolic mirror is set, and a small aperture diaphragm panel is set at the intersection of the off-axis parabolic mirror. The composition of the optical system corresponding to the embodiment of the present invention is as follows figure 2 As shown, figure 2 Among them, the off-axis parabolic mirror is to reverse the long focal length, which is equivalent to the long focal length lens.

[0027] S2. A small aperture diaphragm panel is used to scan the laser beam. The small aperture diaphragm panel is equipped with small holes arranged in descending order of diameter, such as Fig...

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Abstract

The invention discloses a laser beam divergence angle measurement method combining a trepanning method with cross line scanning, relates to the technical field of photoelectric test measurement, and aims to realize divergence angle measurement of laser with an ultra-small divergence angle (lower than 0.4 mrad) and ensure the measurement accuracy and precision. A laser emits laser beams; an off-axis parabolic mirror is arranged in the output light path of the laser; and a small-hole diaphragm panel is arranged at the intersection point of the off-axis parabolic mirror; the small-hole diaphragmpanel is adopted to scan the laser beam; small holes arranged according to diameters from large to small are formed in the small-hole diaphragm panel; the small holes with the diameters smaller than aset diameter threshold value are taken as cross scanning small holes; and the cross scanning small holes are utilized to carry out cross line scanning on the laser beam.

Description

Technical field [0001] The invention relates to the technical field of photoelectric testing and measurement, and in particular to a method for measuring the divergence angle of a laser beam by combining a sleeve hole method with cross line scanning. Background technique [0002] The principle of measuring the divergence angle of the laser by the hole method is to use a long focal length lens to converge the laser beam, and the spot obtained on the focal plane is called the "far-field pattern" of the laser beam. The far-field pattern represents the shape of the laser beam at infinity, so it can more accurately express the shape and structure of the laser beam. The optical path for measuring the divergence angle of the laser with a long focal length lens is as figure 1 Shown. [0003] In the output light path of the laser, a small aperture diaphragm whose aperture size can be electrically controlled is placed at the focal point of the off-axis parabolic mirror. The emitted laser p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01J1/42
CPCG01J1/4257
Inventor 邢冀川吴俊儒吴晓鸣赵子默
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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