Microfluidic device and preparation method thereof
A technology of microfluidics and devices, applied in chemical instruments and methods, laboratory utensils, laboratory containers, etc. problems, to achieve the effect of improving processing efficiency, reducing structure and process complexity
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[0046] The present invention will be further described below in conjunction with specific drawings and embodiments.
[0047] Such as Figure 12 As shown: in the case of satisfying the characteristics of the microfluidic device, in order to reduce the complexity of the structure, the present invention includes a microfluidic substrate 7 and a glass sheet 1 positioned directly above the microfluidic substrate 7, in the A metal electrode layer 12 is provided on the surface of the glass sheet 1 adjacent to the microchannel substrate 1, and an SU8 support body 10 and a microstructure adapted to the SU8 support body 10 are provided on the surface of the microchannel substrate 7 adjacent to the glass sheet 1. Runner 11;
[0048] The metal electrode layer 12 can be bonded and fixed with the SU8 support body 10, and the glass sheet 1 is supported on the microfluidic channel substrate 7 by the bonded metal electrode layer 12 and the SU8 support body 10, and the sheet hole 6 on the glas...
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