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Preparation method of large-size high-purity copper rotating target

A high-purity copper and rotating target technology, which is applied in the direction of manufacturing tools, turning equipment, turning equipment, etc., can solve the problems of coarse target structure, high production efficiency, and low production cost, and achieve uniform structure, convenient operation, and uniform hardness Effect

Active Publication Date: 2021-10-22
SHENYANG NONFERROUS METALS PROCESSING CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The preparation method of the high-purity copper pipe with large aspect ratio with uniform and fine internal structure provided by the invention solves the problems of coarse internal structure, uneven grain distribution and texture of the target material. The preparation method has good operability and high production efficiency. High, low production cost, and can form industrialized mass production

Method used

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  • Preparation method of large-size high-purity copper rotating target

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Effect test

Embodiment 1

[0039]Adopt the preparation method of large-scale high-purity copper rotating target material provided by the present invention to produce high-purity oxygen-free copper ∮172mm*∮125mm*2900mm circular tube target blank, the main technical requirements: the copper content is not more than 99.999%, the oxygen content Not more than 5ppm, outer diameter tolerance ±1mm, tube thickness tolerance ±1mm, grain size less than 100um, grain size difference not more than 20um, Brinell hardness HB less than 60, straightness not more than 1mm / m.

[0040] First, determine the production process according to the product and technical requirements. In this embodiment, the process of "ingot casting-forging-car skin-extrusion-stretching-annealing-finishing-inspection" is selected; secondly, determine the process parameters, control methods and select appropriate equipment , the main equipment in this embodiment is a 2000-ton fast forging machine, a 2500-ton horizontal double-action forward extrusio...

Embodiment 2

[0072] Adopt the preparation method of large-size high-purity copper rotating target provided by the present invention to produce high-purity copper oxygen-free ∮177mm*∮125mm*2700mm circular tube target blanks, other requirements: copper content not more than 99.999%, oxygen content not more than 5ppm , the outer diameter tolerance is ±1mm, the tube thickness tolerance is ±1mm, the grain size is less than 100um, and the grain difference is not more than 20um, the Brinell hardness HB is less than 60, and the straightness is not more than 1mm / m.

[0073] First, determine the production process according to the product and technical requirements. In this embodiment, the process of "ingot casting-forging-car skin-extrusion-stretching-annealing-finishing-inspection" is selected; secondly, determine the process parameters, control methods and select appropriate equipment , the main equipment of this embodiment is a 2000-ton fast forging machine, a 2500-ton horizontal double-action fo...

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Abstract

The invention relates to the technical field of metal material processing, in particular to a method for preparing a large-size high-purity copper rotating target. The preparation method of the large-size high-purity copper rotating target includes the following steps: step 1, ingot selection; step 2, hot forging; step 3, turning; step 4, hot extrusion; step 5, stretching; step 6 , annealing; step 7, finishing: step 8, inspecting and making the pipe. The preparation method of the large-size high-purity copper rotating target provided by the present invention makes the internal structure of the pipe uniform and fine, without deformation texture, the grain size of any point is 0.25-0.33um, and the difference between the maximum and minimum grain size is less than 0.10um; the preparation method of the large-size high-purity copper rotating target provided by the present invention makes the hardness of the obtained pipe uniform, and the Brinell hardness HB value at any point is between 53-55, and the straightness of the pipe with a large aspect ratio is made due to straightening Very good, it is convenient for the subsequent precision machining of the target and the rotation of the target. The preparation method has good operability, high production efficiency, low production cost, and can form industrialized batch production.

Description

technical field [0001] The invention relates to the technical field of metal material processing, in particular to a method for preparing a large-size high-purity copper rotating target, in particular to a uniform fine-grained large-size high-purity copper pipe with an outer diameter greater than 160mm and a length greater than 2700mm The microstructure control process, especially involves a hot forging, hot extrusion, stretching, and annealing process, so that the internal structure of the obtained pipe is uniform, fine, and texture-free, which can be used as a high-quality rotating target. Background technique [0002] The use of high-purity metal sputtering targets is huge, and the quality of the target plays a crucial role in determining the performance of the thin film material, and the utilization rate of the target also plays a considerable role in improving the sputtering efficiency of the target and reducing the manufacturing cost. In addition to the high-purity req...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B23P15/00B23B5/12C23C14/34
CPCB23B5/12B23P15/00C23C14/3407
Inventor 董艳霞于丙宏王永胜张洪王宏君张健张昱尹城钧
Owner SHENYANG NONFERROUS METALS PROCESSING CO LTD