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Mask reparation device

A mask plate and equipment technology, which is applied in welding equipment, laser welding equipment, metal processing equipment, etc., can solve the problem of poor repair effect of the mask plate, and achieve the effect of improving the grinding effect

Active Publication Date: 2020-09-04
WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The embodiment of the present application provides a reticle repairing equipment to solve the technical problem that the existing reticle surface repairing equipment has a poor repairing effect on the reticle

Method used

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Embodiment Construction

[0037] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0038] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the a...

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Abstract

The invention provides a mask reparation device comprising a lapping mechanism. In the lapping mechanism, a first end region of a guide head is connected with a second driving assembly, a second end region abuts against a lapping belt, and the second driving assembly is used to drive the guide head to swing to adjust the lapping angle of the lapping belt. According to the device, the guide head ofthe lapping mechanism is arranged to a swinging mode, and the lapping effect of the lapping mechanism is improved.

Description

technical field [0001] The present application relates to the field of display technology, in particular to a reticle repairing device. Background technique [0002] In the surface repair equipment of the mask plate, when there are stubborn fibers and metal foreign objects, since the laser mechanism cannot remove them, it can only be manually ground, but the repair efficiency of manual grinding is low and it is not suitable for the uneven surface of the mask plate. The foreign matter grinding effect is poor, for example, the foreign matter on the concave surface cannot be ground. Contents of the invention [0003] An embodiment of the present application provides a reticle repairing device to solve the technical problem that the existing reticle surface repairing device has a poor repairing effect on the reticle. [0004] An embodiment of the present application provides a reticle repairing device, which includes: [0005] a grinding mechanism, the grinding mechanism is ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B24B21/06B24B21/18B24B21/20B24B41/06B24B47/20B24B49/12B24B49/16G03F1/72B23K26/36B23K26/70
CPCB23K26/36B24B21/06B24B21/18B24B21/20B24B41/06B24B47/20B24B49/12B24B49/16B23K26/702G03F1/72
Inventor 陈策许亮
Owner WUHAN CHINA STAR OPTOELECTRONICS SEMICON DISPLAY TECH CO LTD
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