Microscopic angular resolution reflected light phase information characterization system and measurement method thereof
A technology of phase information and reflected light, which is applied in optical radiometry, spectrometry/spectrophotometry/monochromator, radiation pyrometry, etc. It is rare to detect phase information in micro-regions with variable angles. and other problems, to achieve the effect of simple phase calculation method and simple optical path
Pending Publication Date: 2020-09-04
SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI
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Problems solved by technology
However, the existing technology is very mature in the measurement of spectral intensity information, but there are few detection methods for the phase information of micro-regions with variable angles, especially for high-frequency electromagnetic waves such as infrared, visible light, and even ultraviolet light. There are even fewer ways to measure
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Embodiment 1
[0046] A microscopic angle-resolved reflected light phase information characterization system and its measurement method, set up as follows figure 1 The optical path shown, the method of measuring the reflection spectrum intensity and phase information is as follows:
[0047] Step 1: Fix the position of the precision translation pinhole 17;
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The invention discloses a microscopic angular resolution reflected light phase information characterization system and a measurement method thereof, wherein the device is divided into a light path 1 and a light path 2; the two light paths both have microscopic functions, lenses in front of two sample platforms are objective lenses and can be used as Fourier transform devices, and the correspondingrelationship between the angle of light emitted by a sample and the position on the focal plane of the objective lenses is achieved; and the light is modulated by the 1 / 4 wave plate and the polarization analyzer at the rear end, and finally, the light is converged to an image plane through the lens. The device can be used for simultaneously measuring the intensity and phase information of reflected light of a sample micro-region under different incident angle conditions, so that comprehensive information of a reflection spectrum can be obtained, and a practical spectrum detection technology is provided for artificial micro-nano structures such as a metamaterial, an optical antenna, a plasmon array and the like and systems such as an optical film, a natural material and the like.
Description
technical field [0001] The invention relates to the technical field of reflected light intensity and phase detection of micro-regions on the surface of materials, in particular to a development and testing method of a spectral reflected light intensity and phase characterization system in ultraviolet, visible-near-infrared and other bands. Background technique [0002] Reflection usually occurs when an electromagnetic wave is incident on an interface composed of two different media. Compared with the incident light, in many cases, the reflected light not only has a change in amplitude but also a change in phase, and its behavior is finally determined by the two parts of information. In recent years, the emergence of artificial micro-nano structure concepts such as metamaterials (metasurfaces), optical antennas, and plasmonic arrays has greatly enriched the means for manipulating electromagnetic waves. Taking metamaterials as an example, under the excitation of the outside w...
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IPC IPC(8): G01N21/25G01J3/42G01J3/02G01J9/00
CPCG01J3/0224G01J3/42G01J9/00G01J2003/425G01N21/255
Inventor 郝加明李晓温俞伟伟文政绩周子骥刘锋
Owner SHANGHAI INST OF TECHNICAL PHYSICS - CHINESE ACAD OF SCI