Evaporation heating source device and manufacturing method thereof, and evaporation device

A heat source and evaporation technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of abnormal evaporation rate, TC damage, affecting the production efficiency of OLED devices, etc., to maintain the evaporation rate , Maintain the equipment utilization rate and avoid the effect of being squeezed

Inactive Publication Date: 2020-09-11
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

However, the thermocouple (themralcouple, TC) in the evaporation heating source device in the existing OLED evaporation machine is in direct contact with the bottom of the crucible. Because the crucible body and evaporation materials are heavy, long-term extrusion of the TC at high temperature will easily damage the TC. , resulting in abnormal evaporation rate, affecting the production efficiency of OLED devices

Method used

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  • Evaporation heating source device and manufacturing method thereof, and evaporation device
  • Evaporation heating source device and manufacturing method thereof, and evaporation device

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Embodiment Construction

[0037] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0038] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the a...

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Abstract

The invention discloses an evaporation heating source device and a manufacturing method thereof, and an evaporation device. The evaporation heating source device comprises a bottom supporting device,a crucible, a thermocouple, a crucible cover and a reflecting coating arranged on the bottom supporting device and used for reflecting heat at the bottom of the crucible to the periphery of the crucible. According to the evaporation heating source device and the manufacturing method thereof, and the evaporation device, the thermocouple can be prevented from being extruded, damaged and deformed, the higher equipment yield of the evaporation equipment is maintained, and the evaporation efficiency is improved.

Description

technical field [0001] The present application relates to the technical field of evaporation, in particular to an evaporation heating source device, a manufacturing method thereof, and an evaporation device. Background technique [0002] Organic Light-Emitting Diode (OLED for short) mainly has the advantages of autonomous light emission, flexible screen, high luminous efficiency, and fast response time. OLED has the advantages of all solid state, ultra-thin, no viewing angle limitation, fast response, room temperature operation, easy realization of flexible display and 3D display, etc. It is unanimously recognized as the mainstream technology of next-generation display. At present, the main way of making OLED devices is heating evaporation coating, which mainly uses a heating container to heat the evaporation material in a vacuum environment, so that the sublimation or molten evaporation material is vaporized at a high temperature, and deposited on a TFT (Thin FilmTransistor...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/26
CPCC23C14/243C23C14/26
Inventor 伍丰伟
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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