Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

Evaporation heating source device and manufacturing method thereof, and evaporation device

A heat source and evaporation technology, applied in vacuum evaporation plating, sputtering plating, ion implantation plating, etc., can solve the problems of abnormal evaporation rate, TC damage, affecting the production efficiency of OLED devices, etc., to maintain the evaporation rate , Maintain the equipment utilization rate and avoid the effect of being squeezed

Inactive Publication Date: 2020-09-11
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
View PDF6 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the thermocouple (themralcouple, TC) in the evaporation heating source device in the existing OLED evaporation machine is in direct contact with the bottom of the crucible. Because the crucible body and evaporation materials are heavy, long-term extrusion of the TC at high temperature will easily damage the TC. , resulting in abnormal evaporation rate, affecting the production efficiency of OLED devices

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Evaporation heating source device and manufacturing method thereof, and evaporation device
  • Evaporation heating source device and manufacturing method thereof, and evaporation device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0037] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Apparently, the described embodiments are only some of the embodiments of this application, not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without making creative efforts belong to the scope of protection of this application.

[0038] In the description of the present application, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", " Orientation indicated by rear, left, right, vertical, horizontal, top, bottom, inside, outside, clockwise, counterclockwise, etc. The positional relationship is based on the orientation or positional relationship shown in the drawings, which is only for the convenience of describing the a...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The invention discloses an evaporation heating source device and a manufacturing method thereof, and an evaporation device. The evaporation heating source device comprises a bottom supporting device,a crucible, a thermocouple, a crucible cover and a reflecting coating arranged on the bottom supporting device and used for reflecting heat at the bottom of the crucible to the periphery of the crucible. According to the evaporation heating source device and the manufacturing method thereof, and the evaporation device, the thermocouple can be prevented from being extruded, damaged and deformed, the higher equipment yield of the evaporation equipment is maintained, and the evaporation efficiency is improved.

Description

technical field [0001] The present application relates to the technical field of evaporation, in particular to an evaporation heating source device, a manufacturing method thereof, and an evaporation device. Background technique [0002] Organic Light-Emitting Diode (OLED for short) mainly has the advantages of autonomous light emission, flexible screen, high luminous efficiency, and fast response time. OLED has the advantages of all solid state, ultra-thin, no viewing angle limitation, fast response, room temperature operation, easy realization of flexible display and 3D display, etc. It is unanimously recognized as the mainstream technology of next-generation display. At present, the main way of making OLED devices is heating evaporation coating, which mainly uses a heating container to heat the evaporation material in a vacuum environment, so that the sublimation or molten evaporation material is vaporized at a high temperature, and deposited on a TFT (Thin FilmTransistor...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/24C23C14/26
CPCC23C14/243C23C14/26
Inventor 伍丰伟
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com