Micro resonant cavity coupling device

Abstract

The invention relates to a micro resonant cavity coupling device which is used for coupling and adjusting an on-chip micro resonant cavity and an optical fiber. A micro resonant cavity sheet fixing device, an optical fiber coupling adjustment device and a visual acquisition device are built on an optical platform to realize the coupling of the micro resonant cavity. The micro resonant cavity sheetfixing device can realize air suction fixation and multi-degree-of-freedom movement adjustment of the micro resonant cavity sheet through a precise one-dimensional guide rail, a rotary table and a micro resonant cavity coupling platform. According to the optical fiber coupling adjustment device, precise adjustment of the relative positions of optical fibers is achieved through a left six-axis adjustment table and a right six-axis adjustment table, coupling optical fibers at the left end and the right end are fixed through optical fiber clamps fixed to the adjustment tables, and then the micro-resonant-cavity coupling rate is increased. According to the visual acquisition device, by designing a CCD camera three-dimensional adjusting mechanism, camera fixing adjustment is achieved, and acquisition of visual information of the micro resonant cavity is achieved. According to the device, through microscopic amplification of the CCD camera and the six-axis adjusting tables in the left sideand the right side of the micro resonant cavity piece, coupling of the micro resonant cavity piece and the optical fiber is achieved, and the coupling precision and efficiency are improved.

Description

technical field [0001] The invention relates to the research of optical micro-resonance cavity, in particular to a micro-resonance cavity coupling device. Background technique [0002] In recent years, optical microresonators have attracted a large number of research interests due to their large Q / V value, frequency-selective characteristics, and energy storage capabilities. People have fabricated high-performance optical microresonators based on a variety of materials. Optical microresonator based on on-chip waveguide is a hot spot in the research of microresonator preparation in recent years. How to effectively couple optical fiber and microresonator on-chip waveguide is an important direction of optical microresonator research. High-precision coupling is very important for optical microresonator. The manufacture and testing of the cavity is of great significance. However, in the research of integrated optics, the coupling between the optical fiber and the on-chip wavegui...

AI Technical Summary

Problems solved by technology

[0003] The traditional micro-resonator coupling device has low adjustment accuracy, small adjustable range, and less adjustment freedom

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