Thin film thickness and humidity detection system
A technology for humidity detection and film thickness, applied in the field of film thickness humidity detection system, can solve the problems of inapplicability to online production, non-availability, and time-consuming, and achieve the effects of fast measurement speed, low cost, and high environmental adaptability
Pending Publication Date: 2020-09-29
科力创(湖南)系统装备有限公司
View PDF0 Cites 1 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0002] The traditional method of measuring the thickness and humidity of the film is mainly carried out by radioactive sources, but with the country's emphasis on environmental protection and safety, this method can no longer meet people's needs
At the same time, there is no device that can measure the humidity and thickness of the film at the same time in industrial production. At present, the principle of sweeping frequency can be used to measure the humidity and thickness of the film at the same time in the laboratory environment, but this method takes a long time and is not suitable for online production. , so there is an urgent need for a film thickness humidity detection system to solve this problem
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0023] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0024] In the following description, references to "one embodiment," "an embodiment," "an example," "example," etc. indicate that such described embodiment or example may include a particular feature, structure, characteristic, property, element, or limitations, but not every embodiment or example necessarily includes the specific feature, structure, characteristic, property, element or limitation. Additionally, repeated use of the phrase "according to one embodiment of the present application" does not necessarily refer to the same embodiment, although it may.
[0025] For simplicity, some technical features known to those skilled in the art are omitted from the following description.
[0026] According to an embodiment of the prese...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more PUM
Login to view more Abstract
The invention provides a thin film thickness and humidity detection system, which utilizes a coaxial circuit element to replace a waveguide device, and solves the problem of conversion between a coaxial signal and a resonant cavity mode. The system specifically comprises an acquisition module, a storage module and an operation module. The acquisition module comprises a switch part, a detector, anisolator and a conversion matcher; the conversion matcher is used for realizing coaxial waveguide conversion and waveguide-to-coaxial operation; and a rack device used for bearing the components is further included. The system has the advantages that 1, compared with the traditional system for measuring the humidity and the thickness of the film, the system is more environment-friendly; 2, the humidity and the thickness of the film can be measured at the same time; 3, compared with a method for measuring and calculating the humidity and the thickness of the film by utilizing sweep frequency, the cost is lower and the measurement speed is high; and 4, the system has high test sensitivity, stability, reliability, maintainability, environmental adaptability and relatively high anti-interference capability, and can meet the requirements of industrial production.
Description
technical field [0001] The invention specifically relates to a film thickness humidity detection system. Background technique [0002] The traditional method of measuring the thickness and humidity of the film is mainly carried out with the method of radioactive sources, but as the country attaches great importance to environmental protection and safety, this method can no longer meet people's needs. At the same time, there is no device that can measure the humidity and thickness of the film at the same time in industrial production. At present, the principle of sweeping frequency can be used to measure the humidity and thickness of the film at the same time in the laboratory environment, but this method takes a long time and is not suitable for online production. , so there is an urgent need for a film thickness humidity detection system to solve this problem. Contents of the invention [0003] The object of the present invention is to provide a film thickness and humidi...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more Application Information
Patent Timeline
Login to view more Patent Type & Authority Applications(China)
IPC IPC(8): G01B15/02G01N22/04
CPCG01B15/02G01N22/04
Inventor 徐程松肖伟贺伟张杨曾来荣
Owner 科力创(湖南)系统装备有限公司
Who we serve
- R&D Engineer
- R&D Manager
- IP Professional
Why Eureka
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Social media
Try Eureka
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap