Miniaturized ozone monitor based on gas-sensitive semiconductor and monitoring method
A technology of semiconductors and monitors, applied in the field of miniaturized ozone monitors and monitoring, which can solve problems such as large numerical fluctuations, easy condensation, and difficulty in ozone monitoring with small instruments
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[0018] The principles and features of the present invention will be described below in conjunction with the accompanying drawings, and the examples given are only used to explain the present invention, and are not intended to limit the scope of the present invention.
[0019] Currently, commonly used in situ measurements of ozone are usually based on UV photometry. Since ultraviolet photometry requires a long enough absorption path to achieve high measurement accuracy, the volume and weight of related instruments are large, and there are strict requirements for power supply, and the miniaturized instruments are usually limited by the length of the optical path. The measurement accuracy fluctuates more Large, and it is difficult to control the temperature, resulting in large fluctuations in the value, and the measurement accuracy and accuracy are affected to a certain extent. Other measurement methods such as those based on electrochemical sensors are susceptible to NO in ambie...
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