Feeding and discharging buffer mechanism with environment control function

Abstract

The invention discloses a feeding and discharging buffer mechanism with an environment control function. The mechanism comprises an environment control chamber, a feeding lifting mechanism, a discharging lifting mechanism, a feeding wafer inserting device, a discharging wafer taking device and a wafer storage box. An environment control unit is arranged in the environment control chamber; the feeding lifting mechanism comprises a feeding movement sliding rail, a feeding movement module and a feeding clamp. The discharging lifting mechanism comprises a discharging movement sliding rail, a discharging movement module and a discharging clamp, the feeding clamp and the discharging clamp drive the wafer storage box to move up and down, the feeding wafer inserting device and the discharging wafer taking device can move horizontally, and silicon wafers are inserted into the wafer storage box or taken out of the wafer storage box. According to the invention, extra equipment cost and workshop space are saved, the transmission of the silicon wafers among different equipment is reduced, and the production yield is improved. Different environmental control units are arranged to meet differentprocess requirements of pretreatment or post-treatment of the silicon wafers in different steps.

Description

technical field [0001] The invention relates to the field of solar cell manufacturing, in particular to a loading and unloading buffer mechanism with environmental control. Background technique [0002] In the manufacturing process of solar cells, there are multiple processes that require pre-treatment or post-treatment of silicon wafers under a certain environment (such as specific temperature, humidity, illuminance, UV light, etc.). Performing these processes through separate equipment not only increases the production steps, but the automatic transmission between equipment will also increase the additional fragmentation rate and reduce the production yield of the main line. Contents of the invention [0003] The object of the present invention is to provide a loading and unloading buffer mechanism with environmental control. [0004] The present invention achieves the above object through the following technical solutions: a loading and unloading buffer mechanism with ...

AI Technical Summary

Problems solved by technology

However, these processes are carried out by separate equipment, which not only increases the production steps, but the automatic transmission between equipment will also increase the additional debris rate and reduce the production yield of the main line.

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