Vertical integrated unit diode chip
A technology of integrating cells and diodes, applied in electrical components, electro-solid devices, circuits, etc., to solve problems such as LED light efficiency, heat dissipation and stability limitations
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Embodiment 1
[0051] This embodiment provides a vertically integrated unit diode chip, including: a second conductivity type electrode 1 , a diode mesa structure 6 , a trench 7 , a diode unit 8 and an electrode line 9 .
[0052] Such as image 3 As shown, the diode mesa structure includes 6 rows of 102 equally sized and uniformly distributed triangular diode units, and the length of the diode units along the x-axis direction is 40 microns. The diode mesa structure adopts a triangular arrangement, and the size of the mesa structure is smaller than the current diffusion length. The diode units are triangular in shape and distributed according to a uniform symmetrical arrangement. The electrode wire is an electrode connecting wire between diode units, the width of the electrode wire is 0.001-20 microns, and the thickness is 0.001-10 microns.
[0053] Such as Figure 4 As shown, the diode mesa structure includes 6 rows of 6 rectangular diode units with uniform sizes, and the length of the di...
Embodiment 2
[0058] This embodiment provides a vertically mounted integrated unit diode chip, such as Figure 6 As shown, the first conductivity type layer 5, the second conductivity type layer 3, the quantum well active region 4 located on the first conductivity type layer, the second conductivity type electrode 1, the insulating medium layer 2, wherein the first conductivity type The type layer is a p-GaN layer, the second conductivity type layer is an n-GaN layer, and the second conductivity type electrode is an n electrode. The trench depth Lx between the diode cells is half the thickness L of the n-GaN layer.
Embodiment 3
[0060] This embodiment provides a vertically mounted integrated unit diode chip, such as Figure 7 As shown, the diode mesa structure includes 4 rows of a total of 30 ladder-shaped diode units of equal size and uniform distribution, and the length of the diode unit along the x-axis direction is 40 microns. The size of the mesa structure is smaller than the diffusion length of the current injection. The shape of the diode units is trapezoidal and distributed according to a uniform symmetrical arrangement. The angle between the side wall of the diode unit and the horizontal plane is greater than 0 degrees and less than or equal to 90 degrees 90, and the shape of the side wall of the diode unit is trapezoidal.
[0061] Such as Figure 8 As shown, the diode cell has a sidewall surface with grooves distributed from the bottom to the top of the mesa. The cross-sectional shape of the trench on the side wall of the diode unit is triangular, the width of the trench on the side wall ...
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