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Structure for improving quality factor of refractive index sensing device and testing method

A technology of refractive index sensor and quality factor, which is applied in the direction of transmittance measurement, phase influence characteristic measurement, etc., can solve the problems of small quality factor, wide sensor bandwidth, etc., achieve significant improvement of quality factor, highly enhanced local electromagnetic field, overcome The effect of wider bandwidth

Active Publication Date: 2020-11-03
CHANGZHOU INST OF MECHATRONIC TECH
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] In order to solve the problems of wide bandwidth and small quality factor of the metal plasmon lattice resonance structure sensor mentioned in the a

Method used

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  • Structure for improving quality factor of refractive index sensing device and testing method
  • Structure for improving quality factor of refractive index sensing device and testing method
  • Structure for improving quality factor of refractive index sensing device and testing method

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specific Embodiment approach 1

[0030] Specific implementation mode one: see Figure 1-5 This embodiment will be described. The structure for improving the quality factor of the refractive index sensor device described in this specific embodiment includes a substrate 4 and a plurality of composite layers arranged in an array on the surface of the substrate 4, and the composite layer includes a metal layer 1, a semiconductor layer 2 and a dielectric layer 3. The metal layer 1, semiconductor layer 2 and dielectric layer 3 are arranged sequentially from top to bottom, wherein the metal layer 1 is a periodic array of metal nanoparticles, and the semiconductor layer 2 is a periodic array of semiconductor nanocolumns. The electrical layer 3 is a periodic array of dielectric nanocolumns.

[0031] The metal nanoparticle array of the metal layer 1, the semiconductor nanocolumn array of the semiconductor layer 2, and the dielectric nanocolumn array of the dielectric layer 3 have the same period and symmetry, and the ...

Embodiment 1

[0044] Such as figure 1 As shown, a structure for improving the quality factor of a refractive index sensing device provided by the present invention includes a substrate 4, a lower dielectric layer 3 located on the surface of the substrate, an intermediate semiconductor layer 2 located above the lower dielectric layer, and an intermediate semiconductor layer located above the intermediate semiconductor layer. Upper metal layer 1; the upper metal layer 1 is a periodic silver nano-cylindrical array, the middle semiconductor layer 2 is a periodic silicon nano-cylindrical array, and the lower dielectric layer 3 is a periodic silicon dioxide nano-cylindrical array. Cylinder array, the substrate 4 is a quartz substrate, the silver nano-cylindrical array of the upper metal layer 1, the silicon nano-cylindrical array of the middle semiconductor layer 2, and the silicon dioxide nano-cylindrical array of the lower dielectric layer 3 have the same period and symmetry.

[0045] The diam...

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Abstract

The invention relates to a structure for improving the quality factor of a refractive index sensing device and a testing method, and belongs to the field of refractive index quality factors of sensors. The structure is composed of a substrate and a composite layer located on the surface of the substrate, the composite layer comprises an upper metal layer, a middle semiconductor layer and a lower dielectric layer, the upper metal layer is a periodic metal nanoparticle array, the middle semiconductor layer is a periodic semiconductor nanopillar array, and the lower dielectric layer is a periodicdielectric nanopillar array. Plasmon lattice resonance with relatively high sensitivity and extremely narrow bandwidth can be obtained by utilizing a multi-element coupling effect among local surfaceplasmon resonance of the metal nanoparticles, Mie resonance of the semiconductor nanorods and diffracted waves of the periodic array and a substrate effect weakened by the dielectric nanorods; the problem that a traditional metal plasmon lattice resonance structure is wide in bandwidth is solved, the quality factor of the refractive index sensing device is improved, and the metal plasmon latticeresonance structure is widely applied to the fields of biology, medicine, food and the like.

Description

technical field [0001] The invention relates to a structure and a testing method for improving the quality factor of a refractive index sensor device, and belongs to the technical field of sensor refractive index quality factor devices. Background technique [0002] Periodic metal nanoparticle arrays have broad application prospects in the field of high-performance sensing because they support plasmonic lattice resonances and can generate highly enhanced localized electromagnetic fields. The sensing performance of sensors based on plasmonic lattice resonance is mainly determined by the quality factor, which is defined as the sensitivity of the plasmonic lattice resonance to the surrounding medium environment divided by the bandwidth of the plasmonic lattice resonance (half height and width), it is clear that the figure of merit can be improved by increasing the sensitivity and / or reducing the bandwidth of the plasmonic lattice resonance. [0003] However, the plasmonic latt...

Claims

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Application Information

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IPC IPC(8): G01N21/41G01N21/59
CPCG01N21/41G01N21/59
Inventor 黄小丹仇超王诗军季小峰王艳朱敏
Owner CHANGZHOU INST OF MECHATRONIC TECH