Vapor deposition chamber
A vapor deposition and chamber technology, applied in electrical components, from chemically reactive gases, crystal growth, etc., can solve the problems of space pollution below, difficulty of etching gas entering the space below, and affecting machine start-up rate, etc., to improve performance , The effect of reducing maintenance time
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[0027] In order to make the objectives, technical solutions, and advantages of the present application clearer, the technical solutions of the present application will be described clearly and completely in conjunction with specific embodiments of the present application and the corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of this application.
[0028] figure 1 The structure of the vapor deposition chamber 1 according to an embodiment of the present application is schematically shown.
[0029] Such as figure 1 As shown, the vapor deposition chamber 1 includes a first subcavity 100 and a second subcavity 200. The first sub-cavity 100 and the second sub-cavity 200 are separated in the longitudinal ...
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