Method and device for aligning superconducting optical detector and optical fiber based on silicon-based etching

An optical detector and optical fiber alignment technology, applied in the field of optical detection, can solve the problems of complex alignment process operation, low photon detection efficiency of superconducting photon detectors, etc.

Active Publication Date: 2022-04-08
NAT INST OF METROLOGY CHINA
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  • Claims
  • Application Information

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Problems solved by technology

As a result, the operation of the alignment process is complicated and needs to be repeated many times to achieve it, which makes the photon detection efficiency of the superconducting photon detector low

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  • Method and device for aligning superconducting optical detector and optical fiber based on silicon-based etching
  • Method and device for aligning superconducting optical detector and optical fiber based on silicon-based etching
  • Method and device for aligning superconducting optical detector and optical fiber based on silicon-based etching

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Embodiment Construction

[0041] In order to facilitate the understanding of the present application, the present application will be described more fully below with reference to the relevant drawings. Embodiments of the application are given in the drawings. However, the present application can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, the purpose of providing these embodiments is to make the disclosure of this application more thorough and comprehensive.

[0042] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the technical field to which this application belongs. The terms used herein in the specification of the application are only for the purpose of describing specific embodiments, and are not intended to limit the application.

[0043] It should be understood that when an element or layer is referred to as being "on," "adjacent," "c...

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Abstract

The present application relates to a method and device for aligning a superconducting optical detector and an optical fiber based on silicon-based etching. The first substrate is etched to prepare through holes for optical fiber positions, and a plurality of first marks arranged at intervals are prepared on the surface of the first substrate. A relative positional relationship is formed between the plurality of first marks and the optical fiber position through hole. When the single-photon absorption film is prepared on the surface of the second substrate, the second substrate is used as the substrate of the superconducting single-photon detector, and the preparation process is adopted for preparing the superconducting single-photon detector. At this time, the relative positional relationship between the multiple second marks and the single photon absorption film is the same as the relative positional relationship between the multiple first marks and the optical fiber position through hole. Furthermore, through one-to-one correspondence between the plurality of first marks and the plurality of second marks, the alignment of the position through hole of the optical fiber and the single photon absorption film can be realized. Therefore, the alignment with the single photon absorption film can be achieved by directly placing the optical fiber in the through hole of the optical fiber position.

Description

technical field [0001] The present application relates to the field of optical detection technology, in particular to a method and device for aligning a superconducting optical detector and an optical fiber based on silicon-based etching. Background technique [0002] Compared with traditional semiconductor photon detectors, superconducting photon detectors have high quantum efficiency, excellent photon number resolution and energy resolution, and their dark count rate is almost negligible. Superconducting photon detectors are widely used in astronomical detection, quantum communication, bioluminescence sensing and other fields. Due to its high quantum efficiency, it is an ideal photon detector for single-photon metrology. [0003] Among them, the key parameter of the superconducting single photon detector is the quantum efficiency. The factor that has the greatest influence on the quantum efficiency is the coupling efficiency between the optical fiber and the photon absorp...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/42
CPCG02B6/4228
Inventor 王雪深钟青李劲劲徐骁龙陈建钟源曹文会王仕建
Owner NAT INST OF METROLOGY CHINA
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