Graphite boat card point automatic loading and unloading device

Abstract

The invention discloses an automatic loading and unloading device for graphite boat stuck points, which comprises a frame main body, a moving frame, a grasping module, a pressing rod module and a pushing rod module; the upper end of the frame main body is fixedly installed with a moving frame, The main body of the frame is provided with a decoration station and an unloading station corresponding to the mobile frame; the ejector module is arranged inside the main body of the frame, corresponding to the decoration station; There is a slidingly connected mobile frame; the grasping module is fixedly connected to the upper end of the mobile frame, and the pressing rod module is fixedly connected to the lower end of the mobile frame; Stuck graphite sheet position, stuck point template position and empty stuck point template position; Empty card point template positions are provided with a lifting adjustment device; the present invention has the advantages of improving the stuck point replacement efficiency and pass rate, and prolonging the service life of the graphite boat.

Description

technical field [0001] The invention belongs to the field of solar cell manufacturing, in particular to an automatic loading and unloading device for a graphite boat stuck point. Background technique [0002] In the production process of solar cells, PECVD (Plasma Enhanced Chemical Vapor Deposition) coating process is an important link in the production process and plays a pivotal role. PECVD utilizes microwave or radio frequency to ionize the gas containing the constituent atoms of the film to form a plasma locally, and the plasma is chemically active and easy to react to deposit the desired film on the substrate. When the silicon wafer is subjected to its surface coating process, the uncoated silicon wafer needs to be inserted into the carrier of the PECVD coating equipment. At present, the wafer carrier usually adopts a graphite boat. The specific operation process is as follows: insert the silicon wafer into the graphite boat and position it on the graphite boat through...

AI Technical Summary

Problems solved by technology

[0003] The replacement method of the traditional graphite boat sticking point is manual operation, the steps are complicated and cumbersome, and the operator’s skill requirements are relatively high. If the skilled operation is not in place, the graphite boat sheet and the graphite boat stuck point will be damaged or the assembly will not be in place during the replacement process. The traditional operation method for replacing graphite boat stuck points is: graphite boat stuck points need to use a simple manual press, the operator sits in front of the press and places the graphite boat sheet flat on the manual press platform, and then sequentially removes the graphite boat sheets. More than 20 stuck points are removed with a manual press. After the graphite boat stuck points are removed, the operator will replace the new stuck points and place them on the corresponding stuck holes. Carefully use the left hand to hold the right hand and turn the press down. The strength should be well grasped. If the strength is too high, the graphite boat and the card will be crushed. If the force is too small, the pressure will not be in place. After pressing the stuck point of a graphite sheet, continue to the next graphite boat card. In general, there are many cases where the graphite boat is damaged or the stuck point is not pressed properly due to the rush of progress, resulting in damage or falling off of the silicon wafer during the production process. The efficiency is low, which leads to slow production progress and affects product quality.

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