Method and device for continuously preparing transparent conductive film

A transparent conductive film and a technology for transparent conductive film, which are applied in the field of continuous preparation of transparent conductive films, can solve the problems of low light transmittance CIGS solar cells, inability to prepare high-efficiency transparent conductive films, etc., and achieve large-scale and efficient production, which is not easy The effect of removing the film and reducing the possibility of

Pending Publication Date: 2020-12-08
宣城开盛新能源科技有限公司
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  • Abstract
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Problems solved by technology

[0005] 1. The CIGS window layer ZnO transparent conductive film prepared by the current technology has low efficiency of CIGS solar cells due to light transmittance, surface defects, thickness control and other reasons.
[0006] 2. The current technology cannot realize the large-area preparation of high-efficiency transparent conductive films for flexible CIGS batteries

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  • Method and device for continuously preparing transparent conductive film
  • Method and device for continuously preparing transparent conductive film
  • Method and device for continuously preparing transparent conductive film

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Embodiment Construction

[0034] In order to make the purpose, technical solutions and advantages of the present disclosure clearer, the present disclosure will be further described in detail below in conjunction with specific embodiments.

[0035] It should be noted that, unless otherwise defined, the technical terms or scientific terms used in the embodiments of the present specification shall have ordinary meanings understood by those skilled in the art to which the present disclosure belongs. "First", "second" and similar words used in the embodiments of this specification do not indicate any sequence, quantity or importance, but are only used to distinguish different components. "Comprising" or "comprising" and similar words mean that the elements or items appearing before the word include the elements or items listed after the word and their equivalents, without excluding other elements or items. Words such as "connected" or "connected" are not limited to physical or mechanical connections, but m...

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Abstract

The invention provides a method and device for continuously preparing a transparent conductive film, and the method comprises the steps: carrying out the magnetron sputtering of an intrinsic ZnO filmlayer on a substrate after the deposition of a buffering layer, and then carrying out the magnetron sputtering of an Al-doped ZnO transparent conductive film layer; wherein a target material adopted by the magnetron sputtering intrinsic ZnO film layer is ZnO doped with 0.1-0.5 wt% of Al, the pressure of a cavity is 0.134-0.412 pa, the flow rate of introduced Ar gas is 20-50 sccm, and the flow rateof introduced oxygen gas is 13-20 sccm. By adopting the method provided by the invention, the light transmittance can be improved. The prepared transparent conductive film is good in uniformity and small in color difference.

Description

technical field [0001] The invention relates to the technical field of manufacturing transparent conductive films, in particular to a method and device for continuously preparing transparent conductive films. Background technique [0002] With the development of material science, transparent conductive films have been widely used in semiconductors, new energy and other devices due to their unique properties. The common ones are SnO 2-x 、In 2 o 3-x , ZnO, etc. Compared with metal transparent films, semiconductor transparent films have the advantages of high transparency, good mechanical properties, and strong film adhesion. [0003] For CIGS thin-film solar cells, considering the film-forming temperature, lattice and bandgap matching, economy, environmental friendliness and other reasons, the transparent conductive film usually used for the window layer is ZnO. The structure of CIGS thin film solar cells is as follows figure 1 shown. [0004] In order to improve the ef...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/0224H01L31/032H01L31/18
CPCH01L31/022483H01L31/0322H01L31/1844H01L31/1884Y02E10/541Y02P70/50
Inventor 黄昭雄连重炎李涛任晓东刘林
Owner 宣城开盛新能源科技有限公司
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