Optical fiber coupling alignment structure and preparation method, optical fiber coupling method

Abstract

The invention provides an optical fiber coupling alignment structure from an optical fiber to an optical waveguide structure, a preparation method and a method for coupling an optical fiber to an optical component. The preparation method of the optical fiber coupling alignment structure includes: preparing an optical fiber groove and an optical waveguide structure in a substrate And the auxiliary alignment part, the longitudinal cross-sectional shape of the optical fiber groove includes a square, the alignment base surface of the auxiliary alignment part fits the coupling end face of the optical fiber, the three sides of the optical fiber groove are in contact with the optical fiber to be coupled, and the optical fiber to be coupled Up and down and left and right will be automatically aligned with the optical waveguide structure, and the optical fiber groove with a square cross-section whose side wall is perpendicular to the bottom of the present invention can be prepared based on a dry etching process, so that the preparation of the optical fiber alignment coupling structure is comparable to other processes ( Compatible with the MEMS process), the size of the optical fiber groove can be flexibly controlled according to the size of the optical fiber. The present invention can form the optical fiber groove, the optical waveguide structure and the auxiliary alignment part based on the same photolithographic etching process, which is beneficial to the precise alignment between the optical fiber to be coupled and the optical waveguide structure.

Description

technical field [0001] The invention belongs to the field of optical fiber signal transmission, and in particular relates to an optical fiber coupling alignment structure and a preparation method thereof, and a method for coupling optical fibers to optical components. Background technique [0002] In the signal transmission process of the optical fiber, the optical fiber needs to be coupled and aligned with the active or passive optoelectronic device, so as to realize the signal transmission process. For example, optical fibers that transmit information using electromagnetic signals at infrared wavelengths must be coupled with silicon photonic chips or other optical components, that is, correctly installed in precise alignment positions to ensure that there is a high enough coupling efficiency between the optical fiber and the silicon photonics chip for correct operation. signal transmission. The two exit ends of each fiber need to be properly aligned at the corresponding p...

AI Technical Summary

Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a fiber coupling alignment structure and preparation method, and a method for coupling an optical fiber to an optical component, which are used to solve the problem of complex fiber coupling methods and poor coupling efficiency in the prior art. It is difficult to improve, it is difficult to achieve effective alignment of optical fibers, and it is difficult to be compatible with existing processing methods such as MEMS.

Images