Optical fiber coupling alignment structure, preparation method and optical fiber coupling method

Abstract

The invention provides an optical fiber coupling alignment structure of an optical fiber-to-optical waveguide structure, a preparation method and a method for coupling an optical fiber to an optical component, the preparation method of the optical fiber coupling alignment structure comprises the following steps: an optical fiber groove, the optical waveguide structure and an auxiliary alignment part are prepared in a substrate, the shape of the longitudinal cross section of the optical fiber groove includes a square; the alignment base surface of the auxiliary alignment part is attached to thecoupling end surface of the optical fiber, the three surfaces of the optical fiber groove are in contact with the optical fiber to be coupled, and the optical fiber to be coupled can be automaticallyaligned with the optical waveguide structure in the vertical direction and the horizontal direction, and the optical fiber groove with the square section with the side wall perpendicular to the bottom can be prepared based on a dry etching process. The preparation of the optical fiber alignment coupling structure is compatible with other processes (such as an MEMS process), and the size of the optical fiber groove can be flexibly controlled according to the size of the optical fiber. According to the invention, the optical fiber groove, the optical waveguide structure and the auxiliary alignment part can be formed based on the same photoetching process, thereby facilitating the precise alignment of the to-be-coupled optical fiber and the optical waveguide structure.

Description

technical field [0001] The invention belongs to the field of optical fiber signal transmission, and in particular relates to an optical fiber coupling alignment structure, a preparation method thereof, and a method for coupling an optical fiber to an optical component. Background technique [0002] In the process of optical fiber signal transmission, it is necessary to couple and align the optical fiber with active or passive optoelectronic devices, so as to realize the signal transmission process. For example, optical fibers that transmit information using electromagnetic signals at infrared wavelengths must be coupled with silicon photonic chips or other optical components, that is, correctly installed in precise alignment positions, in order to ensure that there is a sufficiently high coupling efficiency between the optical fiber and silicon photonic chips for correct processing. signal transmission. The two exit ends of each optical fiber need to be properly aligned at ...

AI Technical Summary

Problems solved by technology

[0006] In view of the shortcomings of the prior art described above, the purpose of the present invention is to provide a fiber coupling alignment structure and preparation method, and a method for coupling an optical fiber to an optical component, which are used to solve the problem of complex fiber coupling methods and poor coupling efficiency in the prior art. It is difficult to improve, it is difficult to achieve effective alignment of optical fibers, and it is difficult to be compatible with existing processing methods such as MEMS.

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