Parallelism detection tool and detection method of parallel rotating shaft

Abstract

The invention discloses a parallelism detection tool and detection method of a parallel rotating shaft. The detection tool comprises a cross beam and a reference flat plate which are arranged in a split mode, the reference flat plate is arranged on one side of the cross beam during measurement, a first meter frame, an angle support, a second meter frame and a V support are arranged on one side ofthe cross beam, and the first meter frame is provided with a vertical first measuring meter. A horizontal second measuring meter is arranged on the angle support, and a vertical third measuring meteris arranged on the second meter frame; the angle support and the V support are respectively provided with a support body used for being in rigid contact with a measured rotating shaft and a referencerotating shaft. One rotating shaft is used as a reference rotating shaft, a 000 flat plate which is parallel to the measured rotating shaft and the reference rotating shaft and is approximately equidistant is used as a reference surface, four contacts are always kept in surface contact with the reference rotating shaft and the measured rotating shaft to measure and calculate the parallelism between the two rotating shafts, the measuring tool is simple, the measuring method is simple, and the measuring precision is high.

Description

technical field [0001] The invention discloses a parallelism inspection tool for parallel rotating shafts and a detection method, and relates to the technical field of mechanical equipment detection. Background technique [0002] The diamond wire cutting machine tool is a special machine tool that uses a special diamond cutting wire to cut and split single crystal bars such as single crystal silicon. The machine tool is usually equipped with 2 or 4 parallel rotating spindles, and the winding diameter of the spindle is equal to ≤ 0.07mm and thousands of cutting wires (usually 2000-4000 at present), the main shaft drives the cutting wires to rotate forward and backward at high speed (currently the highest line speed has reached about 35m / s), so as to realize the cutting of single crystal bar Cutting, the thickness of the cutting piece formed by cutting is usually less than 0.2mm. In order to ensure the quality of the cutting piece and the service life of the diamond cutting wi...

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Problems solved by technology

[0003] The volume of diamond wire cutting machine is usually 25m 3 Above, the weight is more than 15T, which belongs to medium and large-scale special equipment; the main shaft is a freely rotating body with no fixed radial direction, so it cannot build a fixed measurement reference datum; if the datum is created on the machine bed, it will not only increase the processing cost, but also because The span is large, and to ensure the accuracy of the reference, the reference volume is large and the structure is complex. At the same time, there are problems of reference error, and the reference must adapt to the change of the machine tool, etc.

[0004] At present, the parallelism detection of the rotating spindle in the industry usually uses large-scale three-coordinates, which inevitably has two problems: 1. At present, there are very few domestic manufacturers of this special-purpose machine tool, and they are basically privately run. The scale is not large, and there is a lack of such Large-scale three-coordinate equipment, and its utilization rate is very low if it is only purchased for this parameter, and the gain outweighs the gain; 2. At present, the number of such large-scale three-coordinate equipment in China is limited and difficult to find. Even if it is found, it is limited by various factors. It may not be possible to provide testing services, even if testing services can be provided, the cost of testing + transportation is high

Therefore, the detection and control of the parallelism of the rotating spindle by this special machine tool in the current market is costly, difficult to implement, and has limited qualification assurance.

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