Electrical inspection device and holding unit
A technology for electrical inspection and switching units, which is applied in the directions of measuring devices, measuring device casings, and components of electrical measuring instruments, etc., which can solve the problems of applied load and easily increased inertial moment, and achieve the effect of improving efficiency.
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[0061]
[0062] Such as Figure 1 ~ Figure 3 As shown, the electrical inspection device includes: an electrical inspection head 11, which has a plurality of probes 11a that can contact the inspection object substrate P from the normal direction of the inspection object substrate P; a switching unit 12, which has a switchable direction A circuit for connecting a plurality of probes 11a (hereinafter, also referred to as a “switching circuit”); and a bearing 13 that supports the electrical inspection head 11 and the switching unit 12 around an axis parallel to the normal line of the substrate P to be inspected. rotate. In addition, this electrical inspection device includes a case 14 that holds the electrical inspection head 11 and the switching unit 12 . The electrical inspection head 11 , the switching unit 12 , the bearing 13 and the housing 14 constitute the main body 1 of the electrical inspection device. In addition, the bearing 13 and the housing 14 themselves constitu...
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